SMC Corporation of America
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-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing June, 2003 D-YGA P-120 (YG) This catalog is printed on recycled paper with concern for the global environment.

to 200l/min 50 to 500l/min 10 50 11 21 51 Output specification Nil 1 2 Output for display unit Thread type Output for display unit + analog output (1 to 5V) Output for display unit + analog output (4 to 20mA) Nil N F Rc NPT G Wiring specification Nil N 3m lead wire with connector Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 100 200 500 50 10 01 02 03

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Applicable model Flow rate (l/min) Output specifications ZSP Symbol Output specifications Applicable model Symbol 100 200 500 50 10 PF2A710, PF2A750 PF2A711, PF2A721, PF2A751 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

D1 D2 L1 L2 M A 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 9.6 7 10 10 8 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 1 8 15.5 33 33.5 26 34.5 35.5 36.5 37.5 40.5 41.5 43 21.5 22.5 14.5 23.5 23 24.5 23.5 5 32 16 18 10.4 3 16 3.5 16.5 19.5 10 11.4 1 4 4.6 17 20.5

AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8

1 4 3 8 KGD10-02 KGD10-03 39.5 40.5 43 43.5 39 19 10 40 21 18.5 26.5 40.8 12.8 29.0 1 2 KGD10-04 44 45 62 55 56 22 1 4 3 8 KGD12-02 KGD12-03 46.5 47 42 43 12 22 57.2 22 20.9 28.5 45.2 13.9 1 2 KGD12-04 46 48.5 63 127 Stainless Steel One-touch Fittings Series KG Delta: KGD Effective orifice(mm 2) Applicable tube O.D.

1 4 3 8 KGD10-02 KGD10-03 39.5 40.5 43 43.5 39 19 10 40 21 40.8 18.5 26.5 29.0 12.8 1 2 KGD10-04 44 45 62 55 56 22 1 4 3 8 KGD12-02 KGD12-03 46.5 47 42 43 12 22 57.2 45.2 22 20.9 28.5 13.9 1 2 KGD12-04 46 48.5 63 127 Stainless Steel One-touch Fittings Series KG Delta: KGD Effective orifice(mm 2) Applicable tube O.D.

Manifold Type: Individual Wiring, Valve Stations: 8 Stations, P, R Port Location: Both Sides 2~20 Stations, SUP/EXH Block Specification: Internal Pilot, Port Size: 3/8, Thread: Rc, Manifold Mount Style: DIN Rail Mounting

Manifold Type: Individual Wiring, Valve Stations: 6 Stations, P, R Port Location: U Side 2~10 Stations, SUP/EXH Block Specification: Internal Pilot, Port Size: 3/8, Thread: Rc, Manifold Mount Style: DIN Rail Mounting

Manifold Type: 43 (Individual Wiring), Valve Stations: 8 Stations, P, R Port Location: B (Both Sides 2~20 Stations), SUP/EXH Block Specification: Internal Pilot, Port Size: 03 (3/8), Thread: Rc, Manifold Mount Style: D (DIN Rail Mounting)

Manifold Type: 43 (Individual Wiring), Valve Stations: 6 Stations, P, R Port Location: U (U Side 2~10 Stations), SUP/EXH Block Specification: Internal Pilot, Port Size: 03 (3/8), Thread: Rc, Manifold Mount Style: D (DIN Rail Mounting)

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL

Male Run Tee: KPY Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) 2-Applicable tubing Applicable tubing O.D. mm Connection threads R Weight g L1 M L2 D2 KPY04-01 KPY04-02 KPY06-01 KPY06-02 KPY08-01 KPY08-02 KPY10-02 KPY10-03 KPY12-03 KPY12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 40 42 43 45.5 49 50 56 56.5

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5

Rod End Nut Material: Rolled steel -03 32-01 -03 Applicable pin O.D. 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Bore size (mm) Part No.