Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 14 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

1

Port size 01 Port size M5 One-touch fitting (Replaceable) 32 32 32 ( ) C6: 12.8 N7: 16.6 (Pitch) P = 10.5 (Pitch) P = 10.5 (Pitch) P = 12.5 46.4 46.4 46.4 21.1 14 20.1 17 20.1 17 29.8 29.8 29.8 3EB 2B 3EB 2B 3EB 2B 1P 1P 1P 5EA 4A 5EA 4A 5EA 4A One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" 1/8 [4(A), 2(B) port] M5 x 0.8 [4(A), 2(B) port] Port

CATALOG

5.5 10 M10X1.25 36 18 7912 +0.070 0 40 285 800 27 30 63.5 26 16 25 2 13 13 47 M6X1 6 14 M14X1.5 44 18 8714 +0.070 0 50 285 1200 32 35 79 32 20 30 2 14 14 58 M8X1.25 7 18 M18X1.5 55 14 10216 +0.070 0 63 284 1200 32 35 96 38 20 32 2 14 14 72 M10X1.5 7 18 M18X1.5 69 14 10218 +0.070 0 80 284 1400 37 40 99.5 50 25 40 3 20 20 89 M10X1.5 11 22 M22X1.5 80 38 12218 +0.070 0 100 284 1500 37 40 120

Table of Contents

: Values for soft nylon. 15-2-28 20 One-touch Fittings Series KQ2 Adaptor: KQ2N H (width across flats) Applicable fitting size d Connection thread R M d Weight (g) L A Model Applicable fitting size KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 7 34 32 M5 x 0.8 2 6 2 5 13 29 4 2.5 1 8 14 30 M5 x 0.8 10 33 35 37.5 39 41 46 2.5 13 14 30 31 7 6 1 8 10 4.5 1 4 KQ2N06-02S 14.5 14.5 31.5 33 14 14 14

2

AS12l1FG-M5-01A 1/8" AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method

Table of Contents

M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Reference figure 216 Base Mounted Series SY3000/5000/7000 41P Type SY3000: SS5Y3-41PStations -M5, C4, N3 C6, N7 [ ]: AC For M5 x 0.8 One-touch fitting (Pitch) (Pitch) : 6, 1/4" Applicable tubing O.D.: 4, 5/32" (A, B port) 15 P=12.5 15 P=12.5 (A, B port) M5 x 0.8 7 7 6.5 6.5 B B B B 20.7 20.7 SJ A A A A SY SV L2 L1 SYJ 4 SZ + 13.6 + + 14 (3.2) (For mounting) 4 x 4.5 VP4 8.5 2.9 S0700 117.1

ZP

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) 12 16 20 25 C1 H1 L1 X CQ2 9 10 12 15 10.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 12 15.5 RQ 14 18.5 17.5 22.5 Basic Style MU Bore size (mm) Stroke range (mm) E2 F H I S K U L W M N A O B C D E E1 D12 16 20 25 6.5 depth 3.5 14 17 19 22 14 17 21 24 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 32.5 37.5 41.5 47 5 6 8 10 19.5 22.5 24.5 27.5 27 32 36 41.5 Note) External dimensions

CQ2

40 10 2 10 12 12 5 M6 X 1.0 M5 X 0.8 15 5 M5 X 0.8 0 0.052 32 5.5 34 53.5 39.5 12.5 M8 X 1.25 21.5 49.5 4.5 60 45 14 2 14 13 16 7 14 21 10 to 50 RC(PT)1/8 Refer to p.2.3-18 for details rod end nut and optional bracket.

Table of Contents

25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5

Table of Contents

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

ZP

g] ZP3-T16B;-A12-B5 [Weight: 19.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 2 5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4 17 16 Vacuum Inlet Dimensions ZP3-T10B;-A12-U2 ZP3-T13B;-A12-U2 ZP3-T16B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

V100

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

Air Fittings & Tubing

Weight (g) L A M d 7 34 32 KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 2 6 2 5 M5 X 0.8 29 13 4 2.5 1 8 M5 X 0.8 10 30 14 33 35 37.5 39 41 46 2.5 7 30 31 13 14 6 1 8 10 4.5 1 4 14 14 31.5 33 14.5 14.5 KQ2N06-02S 14 1 4 KQ2N08-02S 17 8 6 3 8 KQ2N08-03S 17 17 7.5 34.5 39.5 16 18.5 30 31 10 3 8 KQ2N10-03S Nipple: KQ2N Part No.

Table of Contents

NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27