Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 8 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Stainless Steel One-touch Fittings Series KG

A M Weight (g) D L Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

Series KG Stainless Steel One-touch Fittings

A M Weight (g) L D Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9

SV

Specified layout (Up to 8 solenoids possible.) 18 08 20 08 18 stations 8 stations 20 stations 8 stations PG: Flat ribbon cable 20 pins PG: Flat ribbon cable 20 pins 02 02 2 stations 2 stations (1) (1) Double wiring specifications Double wiring specifications 09 02 09 02 9 stations 9 stations 2 stations 2 stations (2) (2) Specified layout (Up to 18 solenoids possible.)

Vacuum System Peripherals:

46 e Valve Model Fill in the blanks below with symbols of necessary specifications.

High Purity Fluoropolymer

3/8" 52 28 23 24 21 44 1/2" M H 55 1/2" 62.5 39 32 29 26 53.5 3/4" 72 3/4" 25 1 81 49 46 39.5 36 71 1" Class 6 Inch sizes Connection threads Rc/NPT Model Applicable tubing O.D.

MB

There is no mounting interchangeability with serise CA2. 6-6-46

ARM10/11

ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate /min(ANR) Flow rate /min(ANR) Pressure Characteristics ARM10F-06 ARM10

ARM10/11

ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate /min(ANR) Flow rate /min(ANR) Pressure Characteristics ARM10F-06 ARM10

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

One-touch Fittings Series KQ2

D1 L1 D2 L2 A M Nylon 3 Urethane 2.5 3.2 KQ2L23-04 KQ2L04-06 KQ2L04-08 4 6 8 8 10 KQ2L06-10 38.5 19 2 3 11 9.6 7 17 25 26 35 13.5 15.5 10 8 14.5 22 4 10.4 18 4.2 4.2 16 6 KQ2L06-08 12.8 10 20 36.5 11.4 11.4 12 24.5 24 17 8 10 KQ2L08-10 15.2 12 23 39.5 21.6 14.9 20 26 18.5 12 KQ2L08-12 40.5 27 26 10 12 KQ2L10-12 18.5 17 26.5 42 35.2 25.0 29 30 21 12 16 KQ2L12-16 20.9 17 28.5 49.5 50.2 39.7

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 46 3/8" 24 52 28 23 21 44 1/2" M 55 1/2" H 29 62.5 39 32 26 53.5 3/4" 72 3/4" 25 1 39.5 81 49 46 36 71 1" Class 6 Inch sizes (A) shows the reference dimension after connection.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

OMU0023

Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.