High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 1417 A VK300 Series Specific Product Precautions Be sure to read this before handling the products.

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

ZSE40/ISE40

Rc 1/8 12 16-2-23 10 Series ZSE40/ISE40 Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 600 (3000) Lead wire length 3.5 ForM5

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(For 4) C6 (For 6) C8 (For 8) Side P kit: Flat ribbon cable 26P 1 to 12 stations 35 580 20P 1 to 9 stations C10 (For 10) 10-SQ231 J kit: Flat ribbon cable PC wiring system compatible 10-SS5Q23-1 to 8 stations 35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

Secondary Batteries

CE-certified Symbol EX124D-SDN1-X188 DeviceNet (Negative common) Q A, B port size (Inch) A, B port size (Metric) P, E port Applicable series P, E port Applicable series A, B port Symbol C4 C6 C8 M A, B port Symbol N3 N7 N9 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 A, B ports mixed One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 For splash proof use (IP65), insert an air tube into the atmospheric release

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Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions C4 C6 M5 ZSE40(F)/ISE40 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 * For splash proof use (IP65), insert an air tube into the atmospheric release

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

LEC-OM02904

C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.

Rotary Actuator/Vane Type

[mm] Size CRB2 CRBU2 Y X Y X 10 12 (3) 10 (19) 19 (10) 3 (12) 15 15.5 11.5 20.5 6.5 20 17 13 22.5 7.5 30 19 16 26.5 8.5 40 28 17 36 9 Symbol: X5 Specifications with connection port size of sizes 10 and 15 changed to M5 The rotating angle is only 90 and 180. The vane type is compatible with single vanes only.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198

VKF300

Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm ) Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

(max. 20 stations) 3 SY3000 5 SY5000 Connector mounting position A, B port size Symbol Mounting position U U side SY5000 SY3000 D D side Symbol Port size 4 One-touch fitting C4 Symbol Port size 4 One-touch fitting C4 6 One-touch fitting C6 Mixed M 6 One-touch fitting C6 Valve stations 8 One-touch fitting C8 Mixed M Stations Symbol Note Single wiring specifications (up to 16 solenoids are