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22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25

CQ2

B D E J M O YB-10 YU-10 YA-10 100 160 12 YB-03 7 25 9 34 11.5 Depth 7.5 32, 40 12 YB-05 9 32 11 42 14.5 Depth 8.5 50, 63 16 YB-08 11 38 13 52 18 Depth 12 80 19 YB-10 14 50 17 62 21 Depth 14 100 Weight (g) Bore size (mm) Part No. T2 V W T1 S 6.5 10 18 50 80 11 YB-03 32, 40 Part No.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Gasket Round head combination screw 7 8 SY9000-11-2 SY9000-18-2 (M3 x 42) SY5000-11-15 SY7000-11-11 SY3000-11-25 H-NBR For valve mounting (Matt nickel plated) M3 x 26 M4 x 31 SY3000-23-4 (M2 x 21) Thread type Note) For CE-compliant, suffix Q at the end of part no. 129 Series SY3000/5000/7000/9000 How to Order Pilot Valve Assembly 5 G V111 Light/surge voltage suppressor Coil specifications

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

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Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500

Air Slide Table

Bottom view of MXQ12A-40Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12A-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12A-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12A-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12A-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12A-50Z 34 11 37 39 60 23 60 130.5 6 3 102.5 115 MXQ12A-75Z 36 25 41 36 100 42 85 174.5 8 4 146.5 159 MXQ12A-100Z 36

Table of Contents

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

1

Data Series CG1R Adjustable range Width across flats MA Stroke MH + Stroke + Adjustment ML + Adjustment S + Stroke ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) Bore size (mm) 20 25 32 40 50 63 MA 14 17 17 24 32 32 MH 38 41 41 47 60 60 MI 16.2 19.7 19.7 27.8 37 37 ML 18 18 18 22 28 28 MT 9 11 11 11 11 13 S 83 85 91 103 120 126 ZZ 148 158 164 189 225 231 6-17-50 6-17-51 42 Made to Order

Made to Order

(A: 25 mm, B: 50 mm) CA2 series 40 50 63 80 100 9 8 36 8 M12 x 1.25 171 Width across flats ka 11 13 42 8 M16 x 1.5 190 MM 11 17 44 8 M20 x 1.5 200 15 19 54 10 M24 x 1.5 241 15 19 55.5 10 M24 x 1.5 253.5 CA2K, CBA2 (With lock on rod side only) (mm) Bore size (mm) b c d ka MM ZZ ZZ + Stroke + Adjustment d + Adjustment b c 40 50 63 80 100 9 11 44 8 M16 x 1.5 179 11 11 42 8 M16 x 1.5 190 CS1

Smooth Cylinder/Low Speed Cylinder

9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

5

Bore size (mm) B D E J M O d1 d2 YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 L UT YB-08 80 16 11 38 13 52 18 depth 12 C UA YB-10 100 19 14 50 17 62 21 depth 14 Material: Chromium molybdenum steel (Nickel plating) Part no. Bore size (mm) T1 T2 V W RS Weight (g) Part no.

ZP

48 58 11 14.5 20.5 12.8 14.2 16.6 24.5 27 31 42 48 58 11 14.5 20.5 12.8 14.2 16.6 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-41 VV5Z5-42 Before using, refer to page 3-3-8.

CL

11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 1/4 3/8 3/8 1/2 1/2 6 7 7 11 11 MGQ MGG MGC CLAB40SCLA40, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB63SCLA63, #1 (#1+#11) CLAB80SCLA80, #1 (#1+#11) CLAB100SCLA100, #1 (#1+#11) MGF CY1 MY1 3.1

Table of Contents

-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Table of Contents

Refer to page 8-11-96.