HRX-OM-X071

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

Cylinder with Lock

Example) MWB B 40 UT 500 Lock unit Rod length * Refer to page 43 for details on rod lengths.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

C95

L3 d1 H9 MB1 Part no. d3 h KJ27D KJ36D KJ42D M27 x 2 M36 x 2 M42 x 2 110 125 142 70 80 90 37 43 49 51 56 60 4 4 4 36 41 46 125 160/200 250 30 35 40 CA2 CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-12-39 40 Refer to Page 6-16-1 for details on auto switches.

Air Cylinder

Applicable bore size (mm) TB Td TE TF TH TN TR TT CG-020-24A 20 36 8 10 5.5 25 (29.3) 13 3.2 CG-025-24A 25 43 10 10 5.5 30 (33.1) 15 3.2 CG-032-24A 32 50 12 10 6.6 35 (40.4) 17 4.5 CG-040-24A 40 58 14 10 6.6 40 (49.2) 21 4.5 CG-050-24A 50 70 16 20 9 50 (60.4) 24 6 CG-063-24A 63 82 18 20 11 60 (74.6) 26 8 CG-080-24A 80 73 18 11 55 28 0.1 0.3 36 11 CG-100-24A 100 90 22 13.5 65 32 0.1 0.3

ISO Standard Hydraulic Cylinder

Size BTAuto switch mounting screws 1 1 M4 x 0.7 x 8L D-A5, A6 D-F5, J5 DBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 D-Z7, Z8 D-Y5, Y6, Y7 2 2 M4 x 0.7 x 6L Set screw BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 D-Z7, Z8 D-Y5, Y6, Y7 BS4-125, BS4-160 BS4-180, BS4-200 3 2 M4 x 0.7 x 8L Set screw D-A9 D-M9 BS5

VQZ1000/2000/3000

Dimensions Note) A B 29 33 41 D 67 81 93 C 40 52 63 VQZ1000 VQZ2000 VQZ3000 35 43 52 A Note) For grommet Individual EXH spacer VVQZ1000-R-5-M5 (VQZ1000) VVQZ2000-R-5-01 (VQZ2000) VVQZ3000-R-5-02 (VQZ3000) M5: VQZ1000 Rc 1/8: VQZ2000 Rc 1/4: VQZ3000 Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold block.

Series VQ Base Mounted Metal Seal/Rubber Seal

Series/Manifold Option VQ1000 05 12 VQ0 VQ0 VQ1000 Option Symbol Plug lead unit Check for prevention Style (2) B of back press.

CG1

40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5 40 40.5 42 37 50 38.5 50.5 63 49.5 46.5 48 59 80 49.5 46.5 48 69.5 100 ( ): Long stroke, bore size 20 to 100, Double rod Auto Switch Mounting Bracket and Surface St: Stroke (mm) Mounting bracket Trunnion Basic/Foot/Flange/Clevis 1 (Front side) 2 On different ( surfaces ) 2 On the same ( surface ) 1 2 On different ( surfaces ) 2 On the same

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

Title not found

Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Common connector assembly part numbers Positive common specifications For single solenoid SX100-42-4S Negative common specifications For single solenoid SX100-43-4S Common wire COM A B COM A B COM A B COM A B COM A B COM A B COM A B COM A B For double solenoid, 3 position, 4 position types SX100-42-4D For double solenoid, 3 position, 4 position types SX100-43-4D Socket Insert socket into

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-43 43 Date issued: Photo copying this page is recommended.

SZ3000

Common connector assembly part numbers Neg. common specifications for single solenoid SX100-43-4S Pos. common specifications for single solenoid SX100-42-4S Common wire A B A B A B A B A B A B A B A B Double solenoid, for 3 position type SX100-42-4D Double solenoid, for 3 position type SX100-43-4D Socket Insert socket into connector (below COM indicator) of adjacent solenoid valve Precautions

C95Series

HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

40.5 42 38.5 40 44 37 43 24 (36) 27.5 (39.5) 25.5 (37.5) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 63 50.5 50.5 50 47.5 42 38.5 40 44 37 43 32 (46) 33.5 (42.5) 30.5 (44.5) 80 59 48 49.5 46.5 32 (46) 33.5 (47.5) 30.5 (44.5) 100 69.5 48 49.5 46.5 ( ): Denotes the values of long strokes. 8-21-34 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

Air Cylinder Series MB

(mm) Auto switch model Bore size 50 63 80 100 125 32 40 D-A3/A44 D-G39/K39 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BMB2-032 BS1-125 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5F D-F5BAL D-F5NTL BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-P5DWL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BAP2T-080 BMB4-032 BMB4-050 BMB4-050

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(A port bottom ported) How to Order Applicable solenoid valve VKF334VKF VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A VQZ 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Option Valve stations 01 Nil 1 station None VZ Bracket VK300-43-1A With bracket (Not mounted) F 20 20 stations VS 2(A) port: Rc 1/8 Port size 01 Rc 1/8 VFN Type 42: Base mounted (A port side ported) How to Order Applicable