REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 Rod cover Aluminum alloy Rod seal A NBR White anodized q !

SMC Pneumatic Clean Series

R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

RQ

Working principle A + A' A' q When the piston is retracting, exhaust is discharged from both A and A' until piston seal H passes the air passage A. After piston seal H has passed the air passage A, exhaust is discharged only from A'. The section marked with diagonal lines becomes a cushion chamber, and a cushioning effect is achieved.

MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 CL A CL1 MLGC CNG A MNB C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B CNA M(D)LUB25 CNS y CLS !9 i o !5 @0 CLQ Extension locking w q MLGP Section A-A' !

VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Plate Cylinder with Lock Series MLU

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Nozzle Type Ionizer

Description of LEDs q w e No. Description LED Color Contents q Power supply display PWR Green Lights up when the power supply is turned on. w Discharge/Irregular high voltage display ION/HV Green/Red Lights up when static electricity is discharged. (Green)/Lights up if an abnormal high voltage discharge occurs.

CJ2Q

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !

SMC VVQ1000-51A-C6 fitting assy., 6mm, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.28 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-51A-C8

SMC VVQ1000-51A-C6 fitting assy., 6mm, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.28 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-51A-C8

SMC VVQ1000-51A-C6 fitting assy., 6mm, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.28 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-51A-C8

SMC VVQ1000-51A-C6 fitting assy., 6mm, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.28 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-51A-C8

Stations: 6 Stations, Style: Q (DeviceNet), Manifold Mount Style: D (DIN Rail Mounting), Option: N (Name Plate), One-touch Fitting: ø8 (C8) One-touch Fitting, CE Compliant: Q (CE Marked)

Stations: 8 Stations, Style: Q (DeviceNet), Manifold Mount Style: D (DIN Rail Mounting), Option: N (Name Plate), One-touch Fitting: ø8 (C8) One-touch Fitting, CE Compliant: Q (CE Marked)

Stations: 8 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C8 (ø8 One-touch Fitting), Mounting Base: SD (D Side), Kit Type: Q (DeviceNetâ„¢, 16 Output Points), Option 1: SU (Built-in Silencer, Direct Exhaust from U Side), Option 2: W (Dust Poof IP65 Rated), CE Compliant: Q (CE Compliant)