F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

Table of Contents

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

NPP-01-21 Super Compact Direct Acting 2/3 Port Solenoid Valve Super Compact Direct Acting 2/3 Port Solenoid Valve Valve width 7mm Valve width 7mm Power consumption 0.35W(standard) Power consumption 0.35W(standard) 0.1W(with power saving circuit) 0.1W(with power saving circuit) Sonic conductance:C 0.042 [dm3/(s bar)] Sonic conductance:C 0.042 [dm3/(s bar)] Single unit Manifold Base mounted

0.4

unit S kit P kit F kit L kit !

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5

Intrinsically Safe Valve

length) 120.8 Max. 10 5 Body Ported Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 22.6 2 A B C 16.7 53-SY5 20-L-01 (-F2) 2 x M3 x 0.5 thread depth 3.5 (For mounting bracket) 65.4 Insulator: Black () 11.6 A B Insulator: Red (+) 2 x 3.2 (Manifold mounting hole) 16.2 Manual override 36 2 x 1/8" {A(4), B(2) port} 37 (2 x

Speed Controller with One-touch Fitting

Note 2) G thread is not available. 564 Speed Controller with One-touch Fitting Face seal AS Series Elbow Universal Brass Electroless nickel plated How to Order * Only G thread AS-F AS-F TMH ASD Type AS Thread type 2 Elbow 3 Universal G G AS-FE 2 2 0 F G A 1 AS 01 06 G thread KE AS-FG P F A 1 AS 2 0 2 01 06 R, NPT thread AS-FP AS-FM Body size Made to Order For details, refer to page 571. 2

Secondary Batteries

min 2 to 16 l/min 5 to 40 l/min 04 20 40 90 Material restriction Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Thread type Nil N F Rc NPT G Lead wire M12 3 m lead wire with connector Without lead wire Nil N Port size 67 Output specification PNP open collector 2 outputs 4 16 40 Port size Applicable model Flow rate (l/min) Symbol 03 04 06 3/8 1/2 3/4 90-PF2W704, 90-PF2W720

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

V

(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8

VQZ1000/2000/3000

(B), 2(A) port 20 14.6 12 10 10 P 7.2 PE port M5 x 0.8 (Not applicable to standard.) 5-Rc 1/8 1(P), 2(B), 3(R2), 4(A), 5(R1) port 13.4 13.4 1.1 M5 x 0.8 external pilot port (Only external pilot type (R)) L plug connector (L): VQZ1150 1(R)-L-01 M plug connector (M): VQZ1150 1(R)-M-01 Cross section 0.23 mm2 Cover diameter 1.5 (Lead wire length) 54 <59> 300 77 (Metal seal) 75 (Rubber seal)

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

OMU0023

Check End Details of code error sum code ) 1 byte 2 bytes 2 bytes 2 bytes 2 bytes 2 bytes The MSB of the Problems 01-FF code Note 4) LRC CR, LF function code is changed to 1.

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

VS 8-2/VS 8-4

1 F kit P kit T kit L kit M kit !2 !4 !3 !5 !6 !7 The exploded view indicates VV801. 31 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Manifold Assembly Part No. Housing Assembly, SI Unit, etc. Part no.

HRX-OM-X071

A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01 MT.01 to MT.05 D.OUT2 MANT CODE No.20 screen Contact output signal 3 function ALM 1 D.OUT3 SEL No.21 screen Contact output signal 3 operation B A/B D.OUT3 TYPE No.22 screen Contact output signal 3 alarm AL.01 AL.01 to AL.32 D.OUT3