(Full span) 0.05 to 0.7 MPa Rc AF Mounting Linearity (3) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Signal pressure (3) IR 1 8 Signal port PA (3) 02 03 02 04 04 06 10 10 12 14 20 01 Port P A R M5 01 M5 01 01 02 VEX Port size Rc (4) (4) 1 2 1 1 1 4 1 1 8 1

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (W0): SYJ74-W001 02 Approx. 300 (Lead wire length) Applicable cable

Series H, DL, L, LL Self-align Fittings

Thread Rc(PT) L1 L2 M 1 4 1 4 3 8 1 4 1 4 1 4 4 DHF04-02 27 DHF06-02 17 17 10 4 15 30.3 30.8 16 16.5 28 6 11 16 12 DHF06-03 31 19 32.8 18.5 8 DHF08-02 29.8 30 16 20 14 17 15.5 10 12 DHF10-02 30.8 37 DHF12-02 30.8 17 17 40 17 19 34 51 17 17 16.5 16.5 104 Series H, DL, L, LL Self-align Fittings Branch tee: DT Thread R(PT) Part No. Effective orifice (mm2) Applicable tube O.D.

SYA3000/5000/7000

center 02 With sub-plate 3 3 8 With sub-plate 03 3 position exhaust center 4 3 position pressure center 5 1728 5 Port Air Operated Valve Series SYA3000/5000/7000 Specifications Fluid Operating pressure range MPa Air 0.15 to 0.7 100 kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

•

fl tube (mm: N6 (Nylon tube ~/4) 16.5 7 2,5 I P Q, R 'U6 ($Oft IIj).'>'6!

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. . p. 19 Made to Order. p. 26 Function Details. . p. 27 Safety Instructions.

JXCx-OMT0061CN

->/P.32 10.1 ->/P.15 3.4 ->/P.47 11. 5 (CN1: EMG ->/P.12 3. ) SV1.00 INP ON (INP INP OFF PLC ) ->/P.32 10.1 ->/P.12 3. PLC (PLC) 15ms30ms ->/P.55 12.4 91 - () ->/P.47 11. ->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.) Tube extension 0 PAF341 X68 P 13 Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

Series AP500

Refer to gauge guide (P.94).

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

5 Port Air Operated Valve Series SYA3000/5000/7000 1

With sub-plate 02 SYA5000 3 position closed center 00 3 1 4 02 With sub-plate 3 8 With sub-plate 3 position exhaust center 03 4 3 position pressure center 5 5-2-3 2 Series SYA3000/5000/7000 Specifications Fluid Operating pressure range MPa Air 0.15 to 0.7 0.1 to 0.7 0.2 to 0.7 (0.7 x P + 0.1) to 0.7P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 Max. 60 Non-locking push type Not required

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Nozzle Type Ionizer

p. 11 Accessories p. 12 Repair Parts p. 12 Options p. 13 Functions p. 14 Wiring p. 15 Power Supply Cable Connection Circuit p. 16 High flow rate nozzle Timing Chart p. 16 Dimensions p. 17 Related Product Intermittent Control Timer p. 20 Made to Order With Right Angles -X367 p. 21 Nozzle Variations p. 23 Female threads for piping Specific Product Precautions p. 24 Safety Instructions

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Series AK1000

Refer to gauge guide (P.94,95).

LEC-OM07605CN

PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

Thermo-chiller/Rack Mount Type

Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/018/024/030 How to Order VOptional Accessories Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 F.R.L.

VQ7-6/7-8

Series VQ7-8: Manifolds P.22 How to Order Manifolds P.23 Manifold Dimensions (DIN Connector Type) P.24 Manifold Dimensions (Prewired Connector Type) Manifold Options P.25 to 27 Option Dimensions P.28, 29 Manifold Option Mounting Bolt Part Numbers P.30 Manifold Exploded View P.31, 32 Manifold Specifications Sheets P.33 to 36 Safety Instructions P.37 5 Port Solenoid Valve/Precautions P.38