Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

/4 ASV410F-N02 14 13.5 NPT 3/8 ASV410F-N03 14 13.5 NPT 1/4 ASV510F-N02 27 23 NPT 3/8 ASV510F-N03 29 27 JIS Symbol NPT 1/2 ASV510F-N04 29 27 Specifications Series ASV120F ASV220F ASV310F/410F ASV510F Air Fluid 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Ambient and fluid temperature Number of needle rotations 10 turns 8 turns 12 turns 15 turns Applicable

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Table of Contents

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Table of Contents

M4 x 0.7 M5 x 0.8 B C F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc K L Y E 32.5 33 38 6 8 32.5 33 38 8 12 38.5 39 44 6.2 12 38.5 39 44 Model A 6 8 7 2.5 9 3.3 4.7 9.1 4 10.1 Model A D G E D G E D G E D G ZPT20B ZPT25B 32 34 ZF 23.5 24 29 ZPT32B 20 25 22 27 5 8 12.4 10.5 25 28 37 15.6 10.5 18.9 14 ZP ZCU 10, 13, 16 Size 40, 50 Size AMJ Bellows Bellows Misc.

Table of Contents

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) P = 33 (Pitch) P = 33 Manual override (Non-locking) Stations D side Exhaust cleaner (Option) U side Exhaust cleaner (Option) U side mounting 2-Rc 1/8 (X port) 2-Rc 1/8 (PE port) 6-Rc 1/2 Stations n: Station Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261

Air Slide Table

For lubrication, specialized grease GR-F is recommended.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (WO): SY3120-WO(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length) 33 M8 x 1 Approx. 300 (Lead wire length) Approx. 300 15.5 39.6 [46.6] 76.8 [79] 67 [69.2] 62 75.9 68.5 22.5 22.5 22.5 16.9 16.9 16.9 18.5 18.5 18.5 C6: 33.6 N7: 37.4 (3.2) C6: 33.6 N7: 37.4 (3.2) C6: 33.6 N7: 37.4 (3.2) Note) Refer

Table of Contents

Gripping point L (mm) MRHQ F F Misc.

Made to Order

[mm] Bore size Stroke range Without magnet for auto switch Built-in magnet for auto switch CD CT CU CW CX CY CZ D E F J A B A B XC26A XC26B XC26C 32 50 or less 111 23 121 33 10 5 14 20 12.5 52.5 36 16 45 7.5 4.5 75, 100 121 33 40 50 or less 119.5 29.5 129.5 39.5 10 6 14 22 16.5 19.5 12.5 52.5 36 16 52 7.5 5 75, 100 129.5 39.5 50 50 or less 147.5 30.5 157.5 40.5 14 7 20 28 16.5 19.5 12.5

Table of Contents

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

ZP

C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16 24 25 24 25 30 31 6 7 5 8 6 8 6.2 12 13-11-6 Vacuum