Table of Contents

Note 2) Except double (latching). 5 6 Low wattage type Y (2) Note) 200/220 VAC models are applicable to the F and L kits.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

VCC

3 i y !2 Note) q w e r t i o !0!1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

Shock Absorbers and Rate Controls

Porl llonler | flodol (Re0 Y 7. ft T8 IC 'D tt FG FJ TK Bolt ftl woight l{oler lYr.lZ lzrZtU4YJ0S I rltt?J/./Tl9 Ffll7r-l2 2tE2140 PMl500 Seria 2.38 t.06 3.7 5 3.00 .34 2,16 .50 6 .38 N/A Vtt 12.0 or. j|tlt/'.17. .{ l 1 3 .3 r 1 .6 3 1 t.7 5 I.1 4 I l{ /r w 2.3lb. tfll%-t2 2t21293305PR0125/225 2.25 l.?

Soft Start-up Valve

V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width across flats 30 61 AV5000-m06, 10-1 to 6D/Y(Z)

Soft Start-up Valve AV2000/3000/4000/5000 1

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A A1 E1 L1 M10 x 1.25 +0.058 0 0.2 0.4 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 25 30 30 40 50 55 M8 x 1.25 16 20 36 44 56 64 11.5 14 14 20 27 31 21 25.6 41.6 50.6 64 72 8 10 10 14 18 22 8.5 10.5 16 20 23 24 8 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 M14 x 1.5 34 41 42 56 71 79 20 25, 32 40 50, 63 80 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

Power Valve: Economy Valve Series VEX5

At that time, the lower poppet valve y fully opens.

Speed Controller with One-touch Fitting

2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

VZS

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Clean One-touch fitting (for blowing) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection Tubing (rod) connection Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Plug Same dia. tubing 4 6 8 10 12 Different dia. tubing (plug-in reducer) Clean

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

A

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Soft Start-up Valve AV2000/3000/4000/5000

10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Suction Guard (Produced upon receipt of order) FHG Series

P Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size Weight (kg) d 25 25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1

Speed Controller with

1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.