High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

of actuation A B N.C.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

VDW Series

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Water and Air Safety

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17

Air Pilot Operated Series NVSA

I$ODEL NO. 2 , 1 3 (s4) S P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

CRQ2

Rotational axis B d D I m kgm I = m kgm 8 8 Gear: I a + b I = m kgm IB = I + I + I kgm 12 Substitute the moment of inertia IB for rotation around shaft B with the moment of inertia IA for rotation around shaft A. Gear: I IA = (A/B)IB [A/B: Gear tooth ratio] Find the actual moment of inertia.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Rotational axis B d D I m kgm I = m kgm 8 8 Gear: I a + b I = m kgm IB = I + I + I kgm 12 Substitute the moment of inertia IB for rotation around shaft B with the moment of inertia IA for rotation around shaft A. Gear: I IA = (A/B)IB [A/B: Gear tooth ratio] Find the actual moment of inertia.

60

VHS20 to 50-A . ; . ; Built-in silencer (Option) = = @ @ 2 1 (IN) 2 (OUT) IN OUT B B : : Cross section of EXH port > > 3 (EXH) EXH Option Part No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VVFS3000-10A 1 pc.

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: FPM Seal, Body Material: Standard, Pilot System Option: Standard, Thread: Rc(PT), Port Size: 3/8, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket

VXA21/22

How to Order VXA32 VXA31 4 Bracket Nil B None With bracket Stainless steel body model is supplied with bracket.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: FKM Seal, Body Material: Standard, Pilot System Option: Standard, Thread: G(PF), Port Size: 1/2, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: CE Compliance

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FKM Seal), Body Material: Standard, Pilot System Option: Standard, Thread: F (G(PF)), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

Size: 2 [ø15(ø11)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: B (FKM Seal), Body Material: Standard, Pilot System Option: Standard, Thread: N (NPT), Port Size: 15A (1/2), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: No, CE Compliance: Q (CE Compliance)

IDX-OM-W026

C D E F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-

IDX-OM-W014

E D A B P G [AC200V] C F J M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014 6 6-4 IDU3E4E AC100/100,110 (50/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V

IDX-OM-W032

20A R407C(HFC) 42010g 73010g 55010g 67010g R1 R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFA Series 6-1 6 1 IDX-OM-W032 6 6-3 IDFA22EIDFA37E IDFA55EIDFA75E mm A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698