Plug-in Unit

Direct exhaust outlet with built-in silencer Port size 1 2 VQC1000 VQC2000 VQC2000 VQC1000 Symbol C8 C10 C12 N9 N11 N13 S Supply/Exhaust port entry direction Cylinder port side Branch type 1 2 Note) Note) VQC2000 only VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 2-2-63

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

Fieldbus System

10 13.5 (7.5) 25 C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting L2 = L1 10.5 L3 = 16 x n1 + 73.8 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 57 L7 = 47 x n2 + 85.8 C10 [1(P) SUP port] (Double sided type: C12) C10: 10 One-touch fitting (C12: 12 One-touch fitting) L1:

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

0.01

(C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3 28.6 7.1 Manual override (For C6, C8) M5 X 0.8 external pilot port 10.5 (Only external pilot style (R)) (For C10) (For 02

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10.5 Foot bracket 15.4 16.7 PE port P 1 3 R 1.5 A Rc(PT)1/8 R port Rc(PT)1/4 P port 2-3 Die cast hole For manifold gasket positioning DIN terminal (Y): VQZ3l2(R)-lYl-C6, C8, C10, 02 L plug connector (L): VQZ3l2(R)-lLl-C6, C8, C10, 02 88.5 89.5 300 (Lead wire) Indicator light 31.5 35 92.5 MAX.10 Pg.7 Applicable cord O.D.

Intrinsically Safe Valve

/N.O. 0.39 0.46 1.4 0.28 0.40 Double 1/4 Note) [ ]: Indicates normal position C10 10 Onetouch fitting Single 53-SY9 20-C10 2position 6.1 1.9 0.28 0.33 1.4 7.9 Double C12 12 Onetouch fitting Single 2position 53-SY9 20-C12 7.0 2.2 0.25 0.41 1.6 8.6 Double 4 Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position single L-type plug connector (L) 53-SY5120-L-01 (-F2) With foot bracket 53-

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

VVQ2000-51A-C8 VVQ2000-51A-C10 Note) When replacing a pilot valve assembly only, note that SY114 (G, H, L, M) cannot replace SY115 (DIN terminal) or vice versa.

5 Port Solenoid Valve Series SV

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

0.82 3.8 0.26 0.86 3.2 0.34 C10 ( ) 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 2.8 One-touch 3 position 189 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.61 0.25 [0.31] 0.89 [0.61] 2.3 0.38 Note) [ ]: Denotes normal position.

SYA3000/5000/7000

SYA720-C10 2.7 [2.0] 2.4 0.38 [0.38] 0.21 0.70 [0.56] 0.59 0.25 0.27 0.59 0.67 2.8 One-touch ( ) 3 position 113 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 2.3 0.38 0.61 0.25 [0.31] 0.89 [0.61] Note) [ ]: denotes normal position.

5 Port Air Operated Valve SYA3000/5000/7000 Series

( ) SYA720-C10 0.25 0.27 0.59 0.67 2.7 [2.0] 2.4 0.38 [0.38] 0.21 0.70 [0.56] 0.59 2.8 One-touch 3 position 113 2.5 3.8 [2.4] Exhaust center Pressure center fitting for 10 0.25 [0.31] 0.89 [0.61] 2.3 0.38 0.61 Note) [ ]: denotes normal position.

Series VQ Base Mounted Metal Seal/Rubber Seal

(Series VQ2000) Porting specifications Applicable stations Port size Port location A, B P, R Series Side Side Max. 24 Max. 20 C3, C4, C6, M5 C4, C6, C8 C8 C10 VQ1000 VQ2000 Terminal Block Connection Open the terminal block cover for wire connection. Sequence 1.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

VQ7-6/7-8

This is used by mounting it on a manifold block when a valve is removed for maintenance or when it is planned to install an additional valve in the future, etc. 4 2 5 5 5 1 3 1 3 1 3 3 5 1 SUP passage blocking EXH passage blocking SUP/EXH passage blocking Individual SUP spacer Blocking plate (for pilot EXH passage) 02 03 C10 VV71-PAZ503-53A When a valve's pilot valve exhaust effects other

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in