Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

to 8) L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

CY1

BB Attached from top with CAP bolt Bolt size: MD LA A 4Counter bore depth CC X A FG 4-BA LF Body Switch rail FG X A FH XA HB Note 1) FF Note 1) HL D' FE Note 1) Floating block Section D-D' D 20, 25, 32, 40, 50, 63 Attached from top with CAP bolt Floating block L LA A XB WF Attached from bottom with CAP bolt 2-SS (helical insert screw) Body FG XA LF Bolt size: MD R Note 2) S HL FF Note 1)

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

12 1 A S D MIW Double finger type 32 50 1 A S D M9B MIS Single finger type Scraper Cylinder bore 8 12 20 25 32 Nil S No Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches Nil S 2 pcs. 1 pc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

20Data 10-11-7 7 Escapements Series MIW/MIS 8, 12, 20, 25, 32 How to Order Finger option Nil: Basic type (Standard) 1: Tapped on upper and lower faces 2: Tapped on all faces (5 surfaces including end surface) 12 12 1 A S D M9B MIW Double finger type 32 50 1 A S D M9B MIS Single finger type Scraper Cylinder bore 8 12 20 25 32 Nil S No Yes 8 mm 12 mm 10 mm 25 mm 32 mm Number of auto switches

HEC-OM-S008

Host Computer Thermo-con RS-485 RS-485 Symbol Pin No Symbol FG Connector shell FG + 1 + 9 SG 5 FG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No Symbol FG Connector shell FG RD 2 RD SD 3 SD SG 5 SG RS Short CS Figure1-2 Communication Connection (RS-232C) 1-1 HECR Specifications of Communication Method 2 Specifications of Communication Method

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch size 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Caution Controlled flow 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Be sure to read this before handling the products.

CEx-OMG0106

N Terminal No. 6 7 8 9 1 0 0 0 0 2 1 0 0 0 3 0 1 0 0 4 1 1 0 0 5 0 0 1 0 6 1 0 1 0 7 0 1 1 0 8 1 1 1 0 9 0 0 0 1 10 1 0 0 1 11 0 1 0 1 12 1 1 0 1 13 0 0 1 1 14 1 0 1 1 15 0 1 1 1 16 1 1 1 1 0Open between IN6~9 and COM 1Short circuit between IN6~9 and COM Set Home When dip switch is set ON, origins signal is inputted. When dip switch is set OFF, origin input is not required.

VFN2000N

3 Double solenoid Electrical entry VQ7 4 2 Apparent power AC (Power consumption) EVS 5 1 3 Electrical entry VFN Note 1) Use dry-air at low temperature.

Air cooled Thermo-con (Compact type)

Start bit 1 bit Data length 7 bit, 8 bit.

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

4 , 3 8 1 8 , 1 4 1 4 , 3 8 Common EXH VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Side) (Side) (Side) Conduit terminal Conduit Grommet VZS 1 4 1, 1 VFS 1 4 , 3 8 1 8 , 1 4 1 8 , 1 4 Individual EXH (Side) (Side) (Bottom) VS4 Optional piping: Individual SUP

VQ4000

D side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) 3 m 2-5-11 Base Mounted 12 Series VQ4000 Kit (D-sub connector kit) F Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) 70 38 2-Rc 1/8 (Pilot EXH port) 18 18 17.5 PE 30 42 R2 R1 P 1 3 5 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port SMC 6-Rc 1/2 Rc 1/4: Rc 1/4 thread 1(P), 5(R1), 3(R2) port

CEx-OMQ0011

c. d. - 3. 3. 3. 3. 1. 1. 1. 1. a.560 b.2585%RH c. d. e.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.