Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Flow Control Equipment

Tube size AQ 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J AK TMH-05 TMH-07 TMH-09 ASS TMH-11 TMH-13 Dimensions Model D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric Inch TMH-23J TMH-04J 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.5 18.8 21.2 22 TMH-01J TMH-03J TMH-05 3.3 4.5

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Table of Contents - Tubing

Adopts flame resistant resin (Equivalent to UL-94 Standards V-0). How to Use Caution q The multiple tube holder can be cut apart according to the number of tube to be connected.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 1 Station, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 4 Stations, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 8 Stations, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 1 Station, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Blanking Plate: -, CE-compliant: -

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 24 VDC, Electrical Entry: M Plug Connector, Blanking Plate: -, CE-compliant: -

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: M-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: M-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

Table of Contents

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Compact 5-Port Solenoid Valve

G G V V v p. 132 v p. 132 v p. 132 v p. 133 v p. 133 v p. 133 v Individual SUP V External pilot External pilot 11.5 V 16 V *1 Refer to Manifold Specifications on pages 17 and 18 for details on IP67.

Fieldbus system EtherCAT compatible SI Unit

mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V +0.00 to +10.19 V +0.05 to +10.24 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V +0.00 to +5.09 V +0.03 to +5.12 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.09 V +0.78 to +5.12 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA +0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to