Compact Type

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

New

C2.5 to C3 89.1p0.8 89.1p0.8 80 or more 80 or more 11.6 16.4 24.2 10 80A Steel tube 80A Steel tube A Piping A Piping 24 Series VXFA2 Dimensions: Direct piping type VXFA21A<<< VXFA22A<<< VXFA23A<<< A B D E F C 1/4 Pilot port I H G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I VXFA21A< VXFA22A< VXFA23A< 3/4 1 1 1/2 73 84 132 66 74 110 66 74 110 36 45 63 64.5 74.5 106

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Compact Type Dual-Rod Cylinder Series CXSJ

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Table of Contents

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Title not found

Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

Serial Transmission System Series EX250 Series EX500

Ports 2, 4 size (metric) Ports 2, 4 size (inch) Ports 2, 4 Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M Ports 2, 4 Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting

CJP

CM2 15 = C3 CG1 Mounting nut (Refer to page 6-2-13.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

CRB2/CRBU2/CRB1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) (mm) Size N M Q Size d 10 9.5 8.5 M3 15 3.4 15 Body (A) 10 11 M3 20 4.5 20 A port B port A port 13 14 M5 B port Q N 30 5.5 30 14 15.5 M5 (Standard) (Altered) 40 5.5 M 40 20 21 M5 (Top view from long-shaft side) 31 Series CRB2 Symbol: C4 Symbol: C3 Applicable to single vane type only Change

Table of Contents

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

CJP

CM2 15 = C3 CG1 Mounting nut (Refer to page 6-2-13.)

HRX-OM-W002

G4 2 2 [ ] 4 [ ] 18AWG BK 18AWG G/Y 18AWG G/Y 4 IV W W [ ] 3 BK 18AWG BK 8 8 3 W L1/L V M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3

Magnet Gripper

At C3 in the waveform chart, the magnet position cannot be detected. C1: Detection area of the magnet position for workpiece release C2: Detection area of the magnet position for workpiece holding C3: Area where the magnet position cannot be Detected Auto Switch Mounting Position and Mounting Method Table below shows the mounting positions and dimensions of the auto switch.

A

H O W T O O R D E R S E R I E S NCA1 A I R C Y L I N D E R X T A1 NC C O N S T R U C T I O N T Y P E A U T O S W I T C H AT Aluminum Tube (5~8) ACT Composite Tube (5~8) Standard D Auto Switch Capable S T Y L E Standard W Double Rod K Non-Rotating Piston Rod O P T I O N S A Special Rod Thread B5 Oversized Rod (See Chart below for Bore Sizes above 4) B6 High Temperature C3 Port and Cushion

Series SY3000/5000 Valve Replacement Parts 1 How to Order Port Block Assembly Mounting screw 0V 6A SY One-touch fitting Series Thread type 3 3000 Nil Rc 5 F 5000 G N NPT T NPTF Pilot type ∗ Except M5 Nil Internal pilot R External pilot A, B port size Thre

5000 Rc G NPT NPTF Pilot type Nil R A, B port size Thread piping Symbol Port size M5 01 Except M5 Internal pilot External pilot Option for mounting Nil 1 Applicable series SY3000 SY5000 M5 x 0.8 1/8 Standard (Valve mounting screw not falling-out-prevention type) Valve mounting screw falling-out-prevention type One-touch fitting (Metric) Applicable series SY3000 SY5000 Port size Symbol C2 C3