Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: None, Port Size: A03 (Side Piping 3/8), Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 2 (200V AC), Option: NM (Indicator Light, Direct Manual Override), Port Size: B03 (Bottom Piping 3/8), Thread: T (NPTF), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 2 (200V AC), Option: N (Indicator Light), Port Size: A03 (Side Piping 3/8), Thread: T (NPTF), Connector: Connector, Q: Q (CE Approval)

AS-FPQ/AS-FPG

1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

JXCx-OMT0005CN

1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 3 4-7 4byte 8-9 2byte 20Byte 10-11 2byte 12-15 4byte 16 1 17 2 18 3 19 4 Byte0,1 Byte Bit 0 OUT0 DRIVE No.

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC), Option: N (Indicator Light), Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: w/o Subplate, Thread: Rc (PT) (or w/o Subplate Type), Connector: Connector, Q: Q (CE Approval)

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 4 (12V DC), Option: Z (Indicator Light w/Surge Voltage Suppressor), Port Size: A04 (Side Piping 1/2), Thread: T (NPTF), Connector: Connector, Q: Q (CE Approval)

OMR0032

PLC (3) PP (8) (4) The OUT0 (INP) output turns OFF. NP (5) The "BUSY" output turns ON. OUT0 (4)(6)(9)(11) (INP) Output (6)When the traveling is completed, "OUT0" (INP) output turns ON. (5)(7)(10)(12) BUSY (7) The BUSY output turns OFF. Traveling to target position 1 is completed. (8) Enter pulse input signals.

OMR0031

OUT0 (16)(14)(7)(6)(4) The Card Motor decelerates and continues to move at low speed (6 mm/s) from the Position set in Step No.1. (INP) Output OUT1 (11) (9) (7) The "OUT0 (INP) output turns OFF. (INF) The Card Motor pushes the workpiece with the pushing force specified by the Thrust Setting Value. (17)(15)(8)(5) BUSY (8) The BUSY output turns OFF.

MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

AC Servo Motor Driver (CC-Link Type)

(Refer to section 10.4.) 8 8 8 CPU error CPU watchdog error has occurred. JOG operation positioning operation programmed operation DO forced (Note 4) 0 0. b output single-step feed (Note 4) Test operation mode # #. d (Note 1) Motor-less operation # #.

AC Servo Motor Driver (CC-Link Type)

(Refer to section 10.4.) 8 8 8 CPU error CPU watchdog error has occurred. JOG operation positioning operation programmed operation DO forced (Note 4) 0 0. b output single-step feed (Note 4) Test operation mode # #. d (Note 1) Motor-less operation # #.

Seal: S (Metal), Size: 4 (Size 26mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor), Manual Override: Push Type, Internal/External Pilot: Internal Pilot, CE Compliant: Q (CE Compliant)

Seal: S (Metal), Size: 4 (Size 26mm), Configuration: FG (2-position), Number of Solenoids: S (Single), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor), Manual Override: Push Type, Internal/External Pilot: R (External Pilot), CE Compliant: Q (CE Compliant)