Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list

HRX-OM-W002

1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL WH WH WH YL YL OR OR

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

LECA6_C

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

Pulse Valve

MOperation sequence diagram M Operation sequence diagram 4 output points Two-time hitting only for CH2 ON for 1 s OFF for 2 s Stop signal ONt For CH1 OFFt CH2 OFFt CH3 Power supply ON time CH4 2 s 1 s tA tA 1 s CH1 2 s 2 s 2 s 2 s OFFt 1 s 1 s 1 s 1 s CH2 2 s Two-time hitting 1 s CH3 2 s 1 s CH4 Power switch ON (Output start) Power switch OFF (Output stop) Cascade Connection (Multiple-board

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

JIS Symbol 15-9-43 2 Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.

PF-OMM0004_C

0.1L 0.5L 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s -65No.PF-OMM0004-D PF3W704 PF3W720 PF3W740 PF3W711 PF3W721 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() 7 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

LFE-OMY0008

NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 5 7 0.25 s/0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100

4-channel Flow Monitor ( compatible)

Normal output, reversed output Switch output (During SIO mode) Maximum load current 80 mA Maximum applied voltage (NPN output) 30 VDC Internal voltage drop (Residual voltage) 1.5 V or less (Load current 80 mA) Delay time 3 5 ms or less, 0 to variable from 60 s/0.01 s increments Response time 4 3 ms or less Hysteresis Variable from zero 5 Protection Over current protection Input type Voltage

HEC-OM-S008

) . 4-1 4.2 Reading setting temperature . 4-1 4.3 Reading internal sensor . 4-2 4.4 Reading external sensor . 4-3 4.5 Reading alarm status . 4-3 4.6 Offset setting (without writing FRAM) . 4-5 4.7 Reading offset . 4-5 4.8 Temperature setting (with writing FRAM) . 4-6 4.9 Offset setting (with writing FRAM) . 4-7 4.10 Communication Format and Examples of Answers from Thermo-con . 4-8 5 MODBUS

PSxx-OMV0008CN

NPN PNP 2 OFF 80 mA 30 V(NPN ) () 1.5 V (80 mA ) 1 2.0ms (060 s/0.01 ) 2 0 3 MPakPakgf/cm 2barpsi LCD 3 (X2) / 4 (7 ) 4 (1 11 7 ) ON OUT1OUT2 4 030 s/0.01 -86No.PS-OMV0008CN-E ISE70G ISE75G ISE76G ISE77G ISE78G IP67 AC500 V 1 50 M(DC500 V ) -570() -550-1060() 3585RH() CE UL/CSA(E216656)CE EMC RoHS EMC RoHS IO-Link IO-Link V1.1 COM2(38.4 kbps) 5 IODD 2.3 ms

PSxx-OMV0003CN

4 030 s/0.01 -82No.PS-OMV0003CN-G ISE70 ISE71 IP67 AC1000 V 1 50 M(DC500 V ) 050 -1060 () 3585RH() UL/CSA(E216656)CE EMC RoHS IO-Link IO-Link V1.1 COM2(38.4 kbps) 5 IODD 2.3 ms (IO-Link ) Input Data2 byteOutput Data0 byte ID 131(0x0083) ID ISE70-*-L2-*307(0x0133) ISE71-*-L2-*308(0x0134) 1(0 ms) 2 3 MPa/kPa 490 5https://www.smcworld.com 6 02 N02 F02 Rc1/4 NPT1/4 G1/4 C3604

PF-OMN0009_C

,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC -20No.PF-OMN0009CN-F -21No.PF-OMN0009CN-F ,FG 1 DC() 2 N.C./(15V) 3 DC() 4 (1~5V420mA) PF3W5 M8 PF3W5--1/2 15 V/420 mA DC(+) 15 V 1 k

PF-OMN0011_C

2 s 3 1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 -66No.PF-OMN0011CN-C PF3W30 0.4 V ()30 ms / 2 4 7 2 /6 11 ) 5 / 12 DC1224 V10 50 mA 5P 4P (e-con) IP40( IP65) 050 () 3585R.H.() AC1000V1 50M (DC500V ) CE UL(CSA)RoHS 50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5 ) 290(7 s) 390(7 s) -67No.PF-OMN0011CN-C 0100 1 / -10110 1 3F.S. 7 s 2 5F.S. 1090 2 (ZS-

LC6D/LC6C

Power cable Black 0V 2 PD PD+ 8 1 Brown Yellow Red FG 3 Interface cable Interface cable CCW CCW+ 9 2 Green Red Home position switch (+) White 4 CW CW+ 10 3 White Black Black Home position switch (OUT) 5 Motor F Motor B 11 4 Brown White Home position switch () Brown 6 Switch cable Motor cable Motor E Motor A 12 5 Yellow Black Limit switch (+) Yellow 7 Motor cable Motor D GND 13 6 Green Black

IZ-OMU0031-CN

ZS-28-C 37104-3101-000FL 1-1473562-4 A 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A (FG) -11No.IZ*-OMU0031 DC(+) 5 OUT1 4 OUT2 3 2 DC(-) 1 -12No.IZ*-OMU0031 ()(ZS-28-A) IZE110 DC(+) () NPN2 Max.30 V80 mA 1 V 15 V 1 k () OUT1 () OUT2 () DC(-) () DC(+) IZE111 () NPN2 Max.30 V80 mA 1 V 420 mA 600 (DC24 V) 50 () OUT1 () OUT2 () DC(-) () DC(+) IZE112 () PNP2 Max.80 mA 1 V 15 V 1 k

JXCx-OMT0030CN

mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 9.CN2:TB/PC 22 - 6CN 61 1 EMG+ EMG 2 EMGEMG 3 24V + 5 4 3 2 1 4 0V 5 FG FG LEC UL , UL1310 Class2 62 AWG20 (24V0V) 60 EMG AWG20 EMG+,EMG60 8mm 23 - D (100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC) (LEC)EMG+,EMG-OPEN 24 - (LEC) LEC6 (

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

JXCx-OMT0032CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.