4-channel Flow Monitor ( compatible)

Reversed output S The resolution of set and display values. If the minimum setting unit is 2 L/min, the display will change in 2 L/min steps, e.g. 30..32..34 L/min. Smallest settable increment Standard condition The flow which is converted to the volume at 0 oC and 101.3 kPa (absolute pressure). [nor] indicates that the product is standard condition.

HEC-OM-S008

Host Computer Thermo-con RS-485 RS-485 Symbol Pin No Symbol FG Connector shell FG + 1 + 9 SG 5 FG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No Symbol FG Connector shell FG RD 2 RD SD 3 SD SG 5 SG RS Short CS Figure1-2 Communication Connection (RS-232C) 1-1 HECR Specifications of Communication Method 2 Specifications of Communication Method

PSxx-OMV0008CN

50-A) A M4X6L B(ZS-50-B) B M4X6L -15No.PS-OMV0008CN-E 1.50.1 Nm (ZS-48-A) -16No.PS-OMV0008CN-E -02-N02 8~12 Nm -F02 4~5 Nm 24 () -17No.PS-OMV0008CN-E ()336 336 -18No.PS-OMV0008CN-E FG M12 M12 (Port Class A) 1 DC(+) DC1224 V 2 OUT2 2 3 DC(-) 0 V 4 OUT1 1 IO-Link 1 L+ DC1830 V 2 DO 2 3 L0 V 4 C/Q (IO-Link)/1(SIO) -19No.PS-OMV0008CN-E NPN 2 DC(+) OUT1 OUT2 DC(-) PNP 2 DC(+) OUT1

PSxx-OMV0003CN

1028 0x0404 0 R/W dtL2 (OFF ) U16 0 Y OUT2 OFF 0.01 s 0x0x0BB8 (03000) 0.01 s 1030 0x0406 0 R/W FiL () U16 0 Y 5R.D. 0.1 1060 0x0424 0 R/W FSC () S16 0 Y -5050 -68No.PS-OMV0003CN-G () 1 3 dec hex 2 0Std 1dUAL(2 ) 2o1Lv(OUT1 ) 3o2Lv(OUT2 ) 4LinE() 5oFF() 1100 0x044C 0 R/W U8 0 Y std 1101 0x044D 0 R/W Std U8 0 Y 2 1102 0x044E 0 R/W U8 0 Y 2 2 1103 0x044F 0 R/W U8 1 Y Line

PF-OMN0011_C

L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse L/minL 0.5F.S. 0.5F.S. 0.5F.S. 0.5%F.S.(25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 2 1 s/2 s 3 1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 -66No.PF-OMN0011CN-C PF3W30 0.4 V ()30 ms / 2 4 7 2 /6 11 ) 5 / 12 DC1224 V10 50 mA 5P 4P (e-con) IP40( IP65

PF-OMN0009_C

(G )()ISO16030 () 0100 1 3F.S. 7 s 2 5F.S. 1090 2 -29No.PF-OMN0009CN-F (PVC ) PF3W511 PF3W521 (3 mPas(3 cP)) 1 10100 L/min 30250 L/min 070 () 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA IP65 050 () 3585R.H.() AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSFKMCPVC 25A 30 A 270 g 325 g 355 g 410 g 1323mPas(3 cP) 31

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

LC6D/LC6C

) COM (Black) 12 Point output A 13 Point output B A phase (Orange) a phase (Blue) B phase (Red) b phase (Yellow) Point output C 14 15 Point output D READY output 16 2 phase stepper motor BUSY output 17 + Return to origin complete 18 1 2 3 24VDC 24V 0V FG Alarm output 19 N.C 20 Interface connector input/output signal details Power connector input/output signal details Connector no.

PFxx-OMJ0005CN

PFM750 PFM711 N2Ar 0.835.3 1.888.3 4177 8353 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 CO2 0.817.6 1.844.1 488 8176 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 N2Ar 0.837.1 1.892.7 4186 8371 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 / CO2 0.818.5 1.846.3 493 8185 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 -2 0.1 CFM10 -2 1 CFM10 -2 1 CFM10 -2 / 0.1 CFM10 / 0.09.0 0.09.9 09 09 310 -1 310 -1 310 -1 310 -1 ft ft

JXCx-OMT0032CN

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

JXCx-OMT0030CN

USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 9.CN2:TB/PC 22 - 6CN 61 1 EMG+ EMG 2 EMGEMG 3 24V + 5 4 3 2 1 4 0V 5 FG FG LEC UL , UL1310 Class2 62 AWG20 (24V0V) 60 EMG AWG20 EMG+,EMG60 8mm 23 - D (100 ) D 63 CN2SW(EMG+,EMG-) LECEMG CN2SW RY CN4 CN2 EMG+ EMG24V 0V CN2SW EMG+,EMG-(LEC

LFE-OMZ0012

Ensure that the FG terminal is connected to ground when using a commercially available switch-mode power supply. If you have problems with the switch-mode power supply, consider using a noise filter. 3 No. Pin description 4 2 1 DC(+) 2 OUT2 1 3 DC (-) Connector on the body 4 OUT1 Connector pin numbers (male connector) 3 4 2 No.

Seal: R (Rubber), Size: 2 (Size 18mm), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3 (24VDC), Light/Surge Voltage Suppressor: Z (Indicator Light, Surge Voltage Suppressor), Manual Override: Push Type, Internal/External Pilot: R (External Pilot)

Seal: Rubber, Size: Size 18mm, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Light/Surge Voltage Suppressor: Indicator Light, Surge Voltage Suppressor, Manual Override: Push Type, Internal/External Pilot: External Pilot, CE Compliant: -

PSxx-OMU0005CN

K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS2200-01 AS1200-M5 Made to Order Refer to page 647 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Metric size: Light gray Inch size: Orange Note 2) Use 1/8" tubing. Indicator window AS-FG AS-FP 1 180 Indicator window AS-FM Note) Orientation of indicator direction is fixed when manufacturing, and cannot be changed by the user.

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal description Servo ON input P actuation input Signal PULS PULS SIGN SIGN CLR CLR BK COIN SG P-IN Signal S-ON P-ON P-OT N-OT ALMRST PCO SG ALM SG FG Pin no. 1 2 3 4 5 6 7 8 10 13 Driver model SGDE-A5AP SGDE-A5BP SGDE-01AP SGDE-01BP SGDE-02AP SGDE-02BP A B Normal rotation suppression input