VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) Dimensions IC PVQ VEF VEP DXT334-X72-04R-04U VER Mounting section (For M8) L side VEA VY2 VBA VBAT U side D side AP100 1 2 2 x Rc Exhaust port R side Rc 1/2 supply port (L side) 2 x Rc 1/2, Output port 709

0.4

RD SD EX140-SMJ1 131.5 (Single, Double, Dual 3 port valve) 147 (3 position) 24V 2 x M4 0V +24V 24G DA DB DG FG DIN rail clamp screw 69.8 55.9 35 5.5 (131.5) B RATE A 4 0 STATION No. 10.4 5.5 37.6 53.6 B 2 18.5 1 1 12 12 EXH outlet e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 11LEFS 11LEJS A @6 !1o !5 @5 @4 !4 25Aw A-A * Motor bottom mounting type is the same. LEC LEC S LEC SS-T LEC Y LEC Y Motorless Component Parts No. Description Material Note No.

0.4

K Note 6) N R Note 7) S W Note 9) 1 set of regulator unit 2 sets of regulator unit 3 sets of regulator unit With ejector unit Special wiring spec.

Vacuum

'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ?

Vacuum

'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ;x E !

24

FC FD H MGJ FH JMGP 4 x FG through B + Stroke C + Stroke FB FA G FF FE MGP MGP (mm) MGPW Bore size B C FA FB FC FD FE FF FG FH G H 12 42 29 7 6 80 89 18 25 4.5 5 26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198

CJ5-S

LS + Stroke LX LZ ZZ + Stroke Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 Up to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

VQ5000

S. T. Manufacturing Co., Ltd.

HRX-OM-W002

pump mounted . 6-2 6.4 Option T1Inverter pump mounted . 6-3 6.5 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.1 Option YWith feet and no Rack Mounting bracket . 6-4 6.5.2 Anti-quake bracket (Optional Accessories) . 6-5 6.6 Option ZRemoved Parts . 6-6 6.6.1 Option ZRemoved Parts . 6-6 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Power cable Black 0V 2 PD+ PD 1 Yellow 8 Brown Red FG 3 Interface cable Interface cable CCW+ CCW 2 Red 9 Green Home position switch (+) White 4 CW+ CW 3 Black 10 White Black Home position switch (OUT) 5 Motor B Motor F 4 White 11 Brown Home position switch () Brown 6 Switch cable Motor cable Motor A Motor E 5 Black 12 Yellow Limit switch (+) Yellow 7 Motor cable GND Motor D 6 Black 13 Green

Secondary Batteries

(mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D. (mm) 4 6 8 4 6 8 1(P) 1(P) 1(P): Male thread 2(A): One-touch fitting Applicable tubing O.D.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

RD SD EX140-SMJ1 24V 131.5 (Single, Double) 147 (3 position) 2 x M4 0V +24V 24G DA DB DG FG DIN rail clamp screw 55.9 35 5.5 (131.5) B RATE A 4 0 STATION No. 10.4 5.5 37.6 53.6 B 2 18.5 1 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

S. T. Manufacturing Co., Ltd.

New

S S J J I R 24.4 Q z300 K 24.4 I R Q z300 K 1/2 Exhaust port 1/2 Exhaust port 97.5 E 97.5 E U U 24 24 6 x M10 x 1.5 x 30 6 x M10 x 1.5 x 30 (32) (32) 106 106 (17) (17) DIN terminal 247 Q T K J I R Cable 6 to 12 24.4 1/2 Exhaust port G1/2 U (44) E 24 97.5 6 x M10 x 1.5 x 30 (32) Note) Refer to page 24 for the dimensions on the mounting side. (17) 106 Dimensions (mm) Grommet Grommet (with surge

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

EX510-GMJ1.eng

Master unit Remote unit Local unit (Blue) (White) (Yellow) DB DG SLD FG Terminal resister DA Terminal resister DA DA Communication connector for CC-Link DB DG SLD FG DB DG SLD FG CC-Link dedicated cable CC-Link dedicated cable Drawing 2 Connect the terminal resistor between "DA-DB" (Refer to Drawing 3). Terminating resistor Drawing 4 NOTE 1.

LECP6_C

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

Vacuum Module Series ZX

voltage suppressor Red 5 6 V S R Diode Note) Analog output is available only on grommet type.