High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

VFS

For 30 type, common external pilot (on manifold side).

Smooth Cylinder/Low Speed Cylinder

30 31 30 34 30 30 38 37 71.5 81.5 38.5 38 73 69 81 69 30 30 31.5 31.5 30 30 42.5 33 34 34 38 34 34 42 42 76.5 86.5 42 42 78.5 77 86.5 77 34 34 35.5 35.5 34 34 46.5 37.5 41.5 41 41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5

5

30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

XL-OMY0001

-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

MY1

30 30 Data 20 20 20 1.

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Cylinder with Lock Series MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

Manifold Type: 30 (Top Ported Common EXH), Stations: 3 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 7 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 16 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 5 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 8 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 12 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 6 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 2 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 4 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)