ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H

MXS

201 241 OUT 402 281 MXS 8 10, 20, 30, 40, 50, 75 16 8 MGG 60 91 121 151 181 211 IN 302 MXS12 10, 20, 30, 40, 50, 75, 100 OUT 628 126 188 251 314 377 440 20 10 MXS16 MGC 10, 20, 30, 40, 50, 75, 100, 125 IN 471 94 141 188 236 283 330 MXS20 10, 20, 30, 40, 50, 75, 100, 125, 150 OUT 982 196 295 393 491 589 687 25 12 MGF MXS25 10, 20, 30, 40, 50, 75, 100, 125, 150 IN 756 151 227 302 378 454 529

Air Slide Table Series MXS

20, 30, 40, 50 MXS6 119 102 85 68 51 34 170 281 241 201 161 121 80 OUT IN 402 10, 20, 30, 40, 50, 75 MXS8 16 8 211 181 151 121 91 60 302 628 10, 20, 30, 40, 50, 75, 100 MXS12 OUT IN 440 377 314 251 188 126 10, 20, 30, 40, 50, 75, 100, 125 MXS16 20 10 471 330 283 236 188 141 94 10, 20, 30, 40, 50, 75, 100, 125, 150 MXS20 982 OUT IN 687 589 491 393 295 196 25 10, 20, 30, 40, 50, 75, 100, 125

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

CJ2

, 45, 60 6 10 16 3.72 1.77 10 15, 30, 45, 60 CS1 6.86 3.53 Precautions 16 15, 30, 45, 60, 75, 100, 125, 150 14.2 6.86 Minimum Strokes for Auto Switch Mounting Be sure to read before handling.

Basic type / Direct mount type Series CY3B/CY3R

50 CY1S Piston speed mm/s Piston speed mm/s Piston speed mm/s CY1L CY1H (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 CY1F 30 30 30 30 CYP 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D-X 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500

C85

25 11 22 23.8 12.8 4.5 12.8 5 10 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 12 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 16 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 20 91{116} 141 166 25 5 6.6 66 54 42 5 50 40 17 40 36 19 6.6 19 8 96{121} 103{128} 146 171 153 178 25 98{121.5} 146.5 171.5 25 5 6.6 66 54 42 5 50 40 17 40 40 23 6.6 23 8 96{122.5} 110{133.5} 147.5

C85

25 11 22 23.8 12.8 4.5 12.8 5 10 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 12 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 16 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 20 91{116} 141 166 25 5 6.6 66 54 42 5 50 40 17 40 36 19 6.6 19 8 96{121} 103{128} 146 171 153 178 25 98{121.5} 146.5 171.5 25 5 6.6 66 54 42 5 50 40 17 40 40 23 6.6 23 8 96{122.5} 110{133.5} 147.5

17

MGPL25-30 is selected.

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol

Electric Actuator

40 50 0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work load

ZP

) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

How to Order Connector Assembly SY100 30 4A For DC: Caution Bracket For 100V AC: SY100 30 1A When with bracket of SYJ300, do not use it without a bracket. For 200V AC: SY100 30 2A Caution For other voltages of AC: SY100 30 3A How to Use Plug Connector Without lead wire (with connector and 2 sockets.)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

LS + Stroke Z (mm) 4 4 4 4 LC 7 7 6 6 LD 30 25 22 20 LH 3 3 3 3 LT 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 60 69 69 69 LS 54 44 36 32 LX 187 175 173 163 ZZ 10 10 10 10 W 71 58 49 44 LZ Z Bore size 63.5 53 52 47 38.5 34 40 32 25 20 54.5 45 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40 45 4.5 4.5 17.5 17.5 75.5 22 22 11 13 5 5 67 67

5 Port Solenoid Valve, Series VQC

Refer to manifold ordering. 23 24 21 22 19 20 17 18 Terminal no. 28AWG 15 16 6 13 14 Red 11 12 9 10 7 8 26 2 25 1 30 (20P) 37.5 (26P) Connector terminal number 5 6 3 4 1 2 Triangle mark indicator position <26P> <20P> (15.6) Polarity Terminal no. Polarity Terminal no. () L SOL. A SOL. A (+) () (+) 1 1 Station 1 Station 1 SOL. B SOL. B (+) () () (+) 2 2 SOL. A SOL.

0.55

How to Order Manifold Common exhaust Individual exhaust (VF1000 only) VV5F 1 1 04 30 VV5F1 3 04 31 Series Thread type Stations Thread type 1 3 5 VF1000 VF3000 VF5000 Stations 02 Nil Rc 02 Nil 2 stations Rc 00F 00N 00T G 2 stations 00F 00N 00T G xx Manifold model NPT xx 20 20 stations NPT 20 NPTF P, R port size VF1000 VF3000 VF5000 Symbol 20 stations NPTF > 1/8 1/4 3/8 1/2 Up to 10 stations

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300 300 30 134 3.2 171 500

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 500 300 300 500 300 10 15 30 54 4 55 75 23 27 7 5 66 36 82 7 30

EX120/121/122

EX Maximum rated current Voltage with no load (V peak) 5.0 0 to 20 (V) 100 Exceeding 20 (V) up to 30 (V) Voltage figure at peak (2) Class 2 power supply unit in accordance with UL1310 or circuit (Class 2 circuit) in accordance with UL1585, that is powered by Class 2 transformer with the maximum of 30 Vrms (42.4 V at peak) 3.