CG1

/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 106 (114) 16 16 16 16 18 18 22 22 15 (16) 8 10 12 16 20 20 25 30 14 11 11 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 201to350 23 30 16.5 20 26 32 38 50 60 M5 Depth 7.5 5.5 M6 X 0.75 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) Up to 300 301to400 25 25 M5 Depth 8 35.5 44 55 69 80

KR

(mm) Connection thread M thread Uni thread <M5, M6> <M5, M6> A Weight (g) L2 D1 D2 M L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

Rotary Actuator/Vane Type

x 0.8 24.5 10.5 50.5 59 22 14 21 30 50 40 13 22 80.005 0.020 16 0 0.043 5 2 8 12 1.0 26 14 43 M5 x 0.8 depth 18 16.5 M5 x 0.8 depth 10 M5 x 0.8 34.5 14 64 75 24 15.5 25 40 63 45 15 30 100.005 0.020 25 0 0.052 6.5 4.5 9 20 1.0 31 20 56 M5 x 0.8 depth 16 17.5 M5 x 0.8 depth 10 M5 x 0.8 39.8 17 79.5 90 30 21 31.6 57 B CRB2 Series Dimensions: Standard Type 10 Double vane Following figures show

Flow Control Equipment

32 to 63 40 to 100 40 to 100 40 to 100 / 1 8 / 1 4 / 1 4 4.1-35 / 3 8 / 1 4 / 3 8 / 1 2 Applicable tube O.D Applicable cylinder bore size (mm) Page Metric size (mm) Inch size (Inch) Model Port size in cylinder side M5 / 1 8 / 5 32 / 3 16 / 1 4 / 5 16 / 3 8 / 1 2 3.2 4 6 8 10 12 With One-touch Fittings/Elbow 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l 1FG-M5 AS22l 1FG-01 AS22l 1FG-

Modular F.R.L. Unit

40 AW30, 40 AW20 AW30, 40 AW10 to 40 AW10 to 40 AW30, 40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z Note 1) Body size 10 20 30 40 M5 1/8 3/8 1/2 Note 2) Thread type Metric thread (M5) Rc NPT G Nil Note 3) Display units for product name plate, caution plate for bowl, and pressure gauge: PSI, F N Note 1) When more than one specification is required, order in alphanumeric order.

MXS Series Air Slide Table

0 HA GA 5H9 4 deep +0.030 0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40

Modular F.R.L. Units

Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Best Pneumatics Vol. 14

With square embedded type pressure gauge (With limit indicator) With round pressure gauge (Without limit indicator) With round pressure gauge (With limit indicator) With set nut (For panel mount) Applicable model AW10 to 40 AW10 to 40 AW30/40 AW20 to 40 AW10 AW20 to 40 AW10 to 40 Port size PPA Body size Symbol Port size (4) 10 20 30 40 (4) AL M5 01 02 03 04 06 M5 1/8 1/4 3/8 1/2 3/4 G H

4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5

Table of Contents

VS4 16 stations Max. 16 stations.

CXS

CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40

Air Slide Table

F A F Lr 16 16 16 Lr = 120 mm MXQR16-125 0.04 MXQR16-10 MXQR16-10 MXQR16-75 MXQR16-100 MXQR16-125 0.06 MXQR16-50 0.12 MXQR16-75 MXQR16-20 MXQR16-30 MXQR16-20 MXQR16-30 MXQR16-75 MXQR16-75 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXQR16-40 MXQR16-40 MXQR16-40 MXQR16-100 MXQR16-125 MXQR16-100 MXQR16-125 0.03 MXQR16-50 MXQR16-50 MXQR16-100 0.04 MXQR16-40 0.08 MXQR16

Air Cylinder Series CM2

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Mini Free Mount Cylinder

-10 -15 -20 -25 -30 CDUJS20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 M4 x 30 l M4 x 35 l M4 x 40 l M4 x 45 l M4 x 50 l M4 x 55 l M4 x 30 l M4 x 35 l M4 x 40 l M4 x 45 l M4 x 50 l M4 x 55 l M5 x 35 l M5 x 40 l M5 x 45 l M5 x 50 l M5 x 55 l M5 x 60 l M5 x 65 l M5 x 70 l M5 x 75 l M5 x 80 l 20 8.5 M4 x 20 l 9.5 9.5 25 M4 x 25 l 8 7.5 25 M5 x 25 l 11.5 12 Series CUJ Clean Series How to Order Double

Modular F.R.L. Unit

With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure gauge (with limit indicator) With set nut (for panel mount) Applicable model AW10 to 40 AW10 to 40 AW30, 40 AW20 to 40 AW10 AW20 to 40 AW10 to 40 Port size Body size 20 30 40 Symbol Port size Note 4) 10 M5 M5 Note 4) 01 1/8 02 1/4 G 03 3/8 H 04 1/2 06 3/

Rotary Clamp Cylinders

Refer to the following table for the tightening torque for mounting. 10 9 Hexagon wrench key 10.5 (Nm) Wrench Proper tightening torque 0.4 to 0.6 2 to 2.4 4 to 6 8 to 10 14 to 16 Bore size (mm) 12 16 20, 25 32, 40 50, 63 Arm 7 6.5 11.5 10.5 4 Series MK Dimensions: 12, 16, 20, 25 Through-hole (Basic): MKB 12 16 2 x M5 x 0.8 E effective thread depth F 4 x 3.5 B Auto switch Minimum bending radius

Air Cylinder

24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 10 Female Rod End (mm) (mm) (mm) With Air Cushion Bore size WA 20 12 25 12 32 11 40 16 Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 102 25 8 20 M5 x 0.8 102 32 12 20 M6 x 1 104 40 13 21 M8 x 1.25 130 Bore size TT TX TY TZ Z ZZ 20 10 32 32 52 36 144 25 10 40 40 60 40 152 32 10 40 40 60 40 154 40 11 53 53 77 44.5 188

V

56 72 88 104 120 136 152 168 L3 16 32 48 64 80 96 112 128 144 L4 8 24 40 56 72 88 104 120 136 H O W T O O R D E R M A N I F O L D T Y P E 40 S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 S I D E P O R T E D (N)VV3Z3 40 1 N U M B E R O F S TAT I O N S 02 2 Stations to 20 20 Stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) B3T

MHZ2/MHZJ2

40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa 30 30 0.4MPa 0.3MPa Internal gripping 0.5MPa 0.4MPa 0.5MPa 0.6MPa