ARM10/11

Handle position VY1 56 Handle position Top Handle position Front Handle position Bottom A B C Top Front Bottom 84 42 G 84 70 70 P 26(Max.28) U 12 S SMC SMC H L 12 SMC O C K PPA SMC 28.5 AL 6 51.5 80 51.5 15 13 OUT IN 3 28 13 15 13 OUT IN OUT IN 3 3 2. IN/OUT piping position 3. IN/OUT fitting type 5.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

HRX-OM-R026

AL37 sensor failure AL38 Compressor discharge temp. rise AL39 Internal unit fan stoppage Set time AL40 Dust-proof filter maintenance 500h 1 to 9h *12 AL41 Power stoppage AL42 Compressor waiting AL43 Fan breaker trip *12 AL44 Fan inverter error *12 AL45 Compressor breaker trip *13 AL46 Compressor inverter error AL47 Pump breaker trip *13 AL48 Pump inverter error Air exhaust fan stoppage

VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

ZP

32 40 50 ZP50U 53 7 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12

VCL

Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side as port A S Type S42 (solenoid on same side as port

SQ1000/2000

rail mount type Direct mount type Nil E Wiring Stations Note) S D Single wiring Double wiring SSQ2000 PR 4 C10 Note) PL26: 01 to 12 (P kit, 26P) PL20: 01 to 09 (P kit, 20P) JL20: 01 to 08 (J kit, 20P) 01 1 station Bore size Option 12 12 stations C8 C10 N9 N11 8 One-touch fitting 10 One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting

Modular F.R.L. Unit

E Octagon Port size C T-interface B Center of F.R.L. body D A C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 Caution

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

125

x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket

JXCx-OMT0023

9, 10, 12) 25 Proximity dog 10m max.

Modular F.R.L. Units

Model Optional specifications AW20-A AR32P-270AS AR32P-260S AW30-A AR42P-270AS AR42P-260S AW40-A AW40-06-A Bracket assembly Note 1) AR22P-270AS AR22P-260S Set nut G46-10-01 G46-4-01 G46-10-01-L G46-4-01-L AD47-A AD48-A G36-10-01 G36-4-01 G36-10-01-L G36-4-01-L Round type Note 2) Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting N.C. N.O.

VDW

Flow Characteristics Water Air 12 (INN.C.) Orifice dia. (mm ) Port size 12 (INN.C.)

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

Vacuum Unit

How to Order Valve Manifold Assembly t Option3 (For details on the Function/Application, refer to page 42.) Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

Series SV

02 12 stations 2 stations 12 One-touch fitting Note 2) Specified layout (Up to 24 solenoids possible.)

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

Air Catch Sensor Series ISA

4 x 4.5 35 42 Gauge 42 35 42 8 x 4.5 EXH port 69.3 (Max.78.4) EXH port Station 1 n ZSE ISE 69.3 (Max.78.4) 60 OUT 19.5 2.1 60 ZSP OUT OUT OUT OUT OUT OUT Detection port Rc 1/8 19.5 2.1 11.6 PS Detection port Rc 1/8 11.6 Dimensions ISA When the bracket has two stations, it attaches to the first switch.