Modular Design with Uniform Body Style

*2 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Auto drain minimum operating pressure N.C.

Stability of suction position,

5 25 7 5 2 21.5 19.5 5 2 5 10 44 40 29.4 16 35 32 23.3 16 54 50 37 16 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-32BMl 6.2 5.7 9.9 ZP3E-32BMl-P 9.9 9.4 13.6 ZP3E-40BMl 10.2 9.4 16.2 ZP3E-40BMl-P 13.9 13.0 19.9 ZP3E-50BMl 17.9 16.4 28.4 ZP3E-50BMl-P 25.5 24.0 36.0 ZP3E-63BMlZP3E-80BMl43 49.5 56 34 39 45

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

MY1

2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Integrated Controller

10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 600 600 Z 400 400 400 400 Mep m 200 200 200 200 0 0 0 5 10 15 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 6 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting

MNB

4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

LEF-OM002xx

Driving stop: Servo Off End side Motor side Select Test Select OK Select test Caution If an alarm is generated (1) When ALARM is generated, release it by selecting (2) Reset. (2) In the case of an alarm code that cannot be released with Reset, turn the power supply OFF and ON again. (1) Note) For details of alarm codes, refer to the Controller Operation Manual. 5 - 4.

Rotary Actuator

5 @9 !3 @8 @7 @5 @4 e t !4 !1 i !0 !2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Series VQ Base Mounted Metal Seal/Rubber Seal

VS VQ 0 5 1 0 1 Y VS7 (Example) Enclosure Series With lead wire kit/cable (3m) VV5Q11-06C6L2 VQ1100-5 VQ1200-5 VQ1300-5 VVQ1000-10A-1 Dust-proof IP65 W VQ2000 1 2 1 setManifold base No. 2 setsValve No. (Stations 1 to 2) 2 setsValve No. (Stations 3 to 4) 1 setValve No. (Station 5) 1 setBlank plate No. (Station 6) VQ1000 Note) VQ2000 only.

SMC Pneumatic Clean Series

7 5.5 5.5 5 46.5 37.5 33.5 28 188 154 152 144 1/8 88 64 62 62 8 8 8 6 6 5 50 45 45 41 M26 x 1.5 M26 x 1.5 M20 x 1.5 26-0.033 0 11 8 8 16 13 13 1/4 1/8 1/8 26-0.033 0 32-0.039 0 10 8 M32 x 2 10112122Axial foot style (L) / CM2WL, CM2WL Standard port Relief port H H + Stroke A K F G 2-P (Rc, NPT, G) AL H2 G F A K B H1 2-NN AL Relief port 2-M5 x 0.8 LH Width across flats B1 (This drawing shows

0.4

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component

Ionizer

Ion generation frequency Switch setting 1 Hz 3 Hz 5 Hz 10 Hz 15 Hz 20 Hz 30 Hz 60 Hz 0 1 2 3 4 5 6 7 Caution 7) Wiring of power supply cable Connect the dedicated power supply cable.

SV

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) 2-M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 SV 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 SZ 3 3 PWR 3 3 42.7 5 3 E 3 5 E 5 3 E 3 5 E T T 43 PWR 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" 1 1 1 1 BUS 4632

New

VAC 1 Unit Size 1 5/64 2 With surge voltage suppressor N.C.

MY2

6 Single axis type/MY2H w @2 t @1 @9 #8 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

indication (2-color indication) 5 V, 12 V Relay, PLC Yes 2-wire 24 V Water resistant (2-color indication) 12 V Grommet IC circuit With diagnostic output (2-color indication) F79F 4-wire (NPN) 5 V, 12 V Magnetic field resistant (2-color indication) P5DW 2-wire Solid state switches marked with are produced upon receipt of order.

Cylinder with Lock

4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

MY1

MY1CW63 2 10 10 MY1CW32 MY1CW32 MY1CW32 MY1CW40 MY1CW40 MY1CW40 MY1CW50 MY1CW50 MY1CW50 MY1CW25 MY1CW25 MY1CW25 MY1CW40 MY1CW40 MY1CW40 MY1CW32 MY1CW32 MY1CW32 5 4 5 MY1CW20 MY1CW20 MY1CW20 1 MY1CW32 MY1CW32 MY1CW32 4 MY1CW25 MY1CW25 MY1CW25 MY1CW16 MY1CW16 MY1CW16 3 3 MY1CW25 MY1CW25 MY1CW25 MY1CW20 MY1CW20 MY1CW20 0.5 0.4 2 2 MY1CW20 MY1CW20 MY1CW20 MY1CW16 MY1CW16 MY1CW16 MY1CW16 MY1CW16