Table of Contents

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can

VM

0 Polyacetal Guide bushing NBR Mini Y packing @1 !1 Urethane rubber Cushion 3.5-54 VFM200 Series VFM200 Basic/VFM250-02-00 JIS Symbol 16N F.O.F. 0.5MPa supply 1mm P.T. 2mm O.T. 3mm T.T. Roller Lever/VFM250-02-01, VFM250-02-01S JIS Symbol 8N F.O.F. 0.5MPa supply 2.2mm P.T. 4mm O.T. 6.2mm T.T.

Modular/F.R.L. Units Series AC

AF F F E E B C AR Cross spacer E: 4 x Rc F: Without thread E D A AL A 23 B 16 C 14 D 25 Applicable model AC10 Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 AW AC20 40 40 22 40 AG AC25, AC30 49 43 28 48 AV AC40 60 48 36 54 AF800 AF900 Caution on Mounting AC40-06 72 62 40 62 1.

4/5 Port Air Operated Valve Series SYJA3000

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

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(Note that double and 3 position valves cannot be used where single solenoid wiring has been specified.). 26 pins (P) connector 20 pins (PG) connector 10 pins (PH) connector Note Stations Symbol Note Stations Symbol Note Stations Symbol 02 2 stations 02 2 stations 02 2 stations (1) (1) (1) Double wiring specifications Double wiring specifications Double wiring specifications 10 08 04 10 stations

A

6 1/4 5 5/8 7/8 1/2 3/4-16 5/8 7/16 4.7 1/2 0 1.57 1.18 3.32 2.34 1 1/8 1 1/2 1 1/2 3/8-24 4 1/2 5 7/16 6 1/4 1 3/8 400 (4) 1 2.72 6 1/4 5 5/8 7/8 1/2 3/4-16 5/8 7/16 D I M E N S I O N S S I D E-TA P P E D T Y P E NC A1R E/2 BORE (INCH) KK A AA B BA C D DD E EA EE G J NT TN WF Y MM LF P XT ND SN ZB 1 7/16-20 1/4-28 1/4-20 150 (1.5) 3/4 2.02 1 1/8 1 1/8 3/8 2 0.3 1.26 1.1 1 1.71 5/8 3 5/8

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

One-touch Fittings

to Order P.66 Variations P.67 Dimensions P.68 Metric P.65 2 3.2 4 6 8 10 12 16 V V V How to Order P.74 Variations P.75 Dimensions P.76 Inch P.73 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V How to Order P.82 Variations P.83 Dimensions P.84 Inch P.81 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V Gasket Seal (Uni Thread) Connection thread Applicable tubing How to Order P.88 Variations P.89 Dimensions

CG5-S

(mm) Connection threads Connection threads Model Model M5 x 0.8 KGS04-M5 -01 KGS06-M5 -01 -02 KGS08-01 -02 -03 KGS10-01 -02 -03 -04 KGS12-02 -03 -04 4 M5 x 0.8 KGW04-M5 -01 -02 KGW06-M5 -01 -02 -03 KGW08-01 -02 -03 KGW10-02 -03 -04 KGW12-02 -03 -04 4 R 1/8 R 1/8 R 1/4 M5 x 0.8 6 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4

VM

Note 3) The handle of the selector (2 position and 3 position) cannot be removed or replaced alone. 5-6-20 2/3 Port Mechanical Valve Series VM200 How to Order S 01 02 3 0 VM2 Suffix for actuator Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 NPT N02 G F02 1 4 Roller lever 01 Black 1 4 One way roller lever 02 Green SA 1 4 Straight plunger

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KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

V 02 ( ) 1 4 02 ( ) 03 ( ) 04 ( ) 02 ( ) 03 ( ) 04 ( ) Port no.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

holes for manifold) 2 x 1/4" {A (4), B (2) port} 20 42 (52) (2 x 4.2 Mounting holes) 44 (For E type) 0.3 mm2 (42.5) (49.5) 40 40 24.5 14.7 1.55 (1.2) L 167.8 (Lead wire length) (14) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} (83.9) 0.9 18 2 EB P EA (23.9) 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (LL) 52-SY7220-LL-02 (-F2) L 157.6 (Lead wire length

VZ100/300/500

of P port and exhaust air from both sides of R port. 40R-1 Applicable solenoid valve VZ314RVZ324RApplicable blanking plate assembly DXT200-8-3A How to Order VV3Z3 40R 05 1 M5 Stations A port side 2 stations 02 X port P/R port Thread type M5 x 0.8 1/8 M5 01 C4 C6 B3 B7 P port 20 stations 20 Nil Rc G NPT NPTF One-touch fitting for 4 A port F N T One-touch fitting for 6 R port M5 x 0.8, 1/8

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Flow Control Equipment

Controller / 1 4 / 3 8 / 1 2 With One-touch Fittings/Universal / 1 8 20 to 32 20 to 40 40 to 63 63 to 100 AS23l 1FE-01 AS23l 1FE-02 AS33l 1FE-03 AS43l 1FE-04 / 1 4 / 3 8 / 1 2 Port size on piping side Standard/In-line (Metal Body) M3 M5 / 1 8 / 3 4 1 2 1 1 / 1 4 / 1 4 / 1 2 / 3 8 / 1 2 AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 20 to 32 20 to 40 32 to 63

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(Note that double and 3 position valves cannot be used where single solenoid wiring has been specified.). 26 pins (P) connector 20 pins (PG) connector 10 pins (PH) connector Note Stations Symbol Note Stations Symbol Note Stations Symbol 02 2 stations 02 2 stations 02 2 stations (1) (1) (1) Double wiring specifications Double wiring specifications Double wiring specifications 10 08 04 10 stations

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.