Free Mount Cylinder

9, @0, @1. Seal kit includes !9, @0, @1.

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

Modular Type Regulator Series AR

03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60 AR25 to 60 AR25 to 40 Description With bracket With round pressure gauge (with limit indicator) With set nut (for panel mount) Option Note 1) Symbol Nil B G Note 2) Applicable model AR20 to 60 AR20 to 60 AR20 to 40 Description With bracket With round

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

3 Port Air Operated Valve Series SYJA300

Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52

3 Port Air Operated Valve

1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-101 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 1/8, 1/4 3(R) port 18.5 11.2 30 2A NO 35 43 NC 12 3R 1P NC 1/8 12(

Clean Regulator

air, N2 Clean air, N2, Ar, CO2, Pure water Fluid Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Grade B Air, N2, Ar, CO2, Water Air, N2 Port size Proof pressure 1.5 MPa Grade A Clean air, N2 Clean air, N2, Ar, CO2, Pure water Max. operating pressure 1.0 MPa Fluid Grade B Air, N2 Low pressure type High pressure type Air, N2, Ar, CO2, Water 0.02 to 0.2 MPa Set

E-P HYREG

B VVEX 1 5 01 Body size Pilot type Valve stations Port size 1 22 Note 1) 2 stations 1(P), 3(R) 2(A) Internal pilot Ex.) VVEX2-2-5-02 VY1200-00-G 4 pcs.

SYA3000/5000/7000

Model/Series SYA540 (Base mounted) Valve model Port size Flow characteristics Note 1) Type of actuation Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Mass Note 2) (g) Cv b Cv C [dm3/(sbar)] C [dm3/(sbar)] 105 (42) 110 (47) Single Double Closed center 2 position 2.4 0.41 0.64 2.8 0.29 0.66 SYA540-02 M5 x 0.8 1 4 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8 0.33 [0.48] 0.40 0.72 [0.37] 0.47

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

17 10.5 PE port (Rc(PT)1/8) (Rc(PT)1/8) VP 3-Rc(PT)1/8,1/4 10 (Rc(PT)1/4) 18 P/A/R port (Rc(PT)1/4) VQ DIN terminal (Y): VQZ2l5(R)-lYl01 02 01 02 L plug connecter (L): VQZ2l5(R)-lLlVQZ VZ Indicator light 83(84) 300 VS (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 53(56.5) 87 MAX.10 Applicable cord O.D.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Model/Series SYA740 (Base mounted) Valve model Type of actuation Port size Flow characteristics Note 1) Pilot port size (Nominal size) b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Weight Note 2) (g) 240 (111) 286 (157) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv Single Double Closed center 2 position 1.0 4.1 0.41 1.1 4.1 0.29 SYA740-02 1 8 1 4 1.1 [0.49] 0.72 0.42 0.43 0.71 0.80 4.7 [1.7] 2.6 0.35 [

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

SYJ VQZ300 Port size Symbol VQZ200 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc 1/4 1 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VK (A) 2 N.O.

VFA3000

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

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1", 85 MSXO.8 1 ' GN E leclcic NBIllf,1-"'6J B Bellows type M6 x l B6 16. 1 6 .. GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'1'>32 ,,~ listO Pad Dia.

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area JIS symbol AS221FM-01 AS231FM-01 Models AS121FM AS131FM AS221FM-02 AS231FM-02 6, 8 3.2, 4 3.2, 4, 6 8, 10 4 6 Metric size 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" Tube O.D. 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 38 Flow rate l/min (ANR) Controlled flow 0.2 0.1 0.6 Effective area mm Flow direction symbols on body 230 180 100 460 260 390 Flow rate

5 Port Solenoid Valve Series SV

Common (+, ) Station 1 A side Station 1 B side Station 2 A side Station 2 B side Station 3 A side Substrate for single Station 3 Substrate for double Station 2 Substrate for double Station 1 A and B ports can be individually controlled. Three combinations are available: [N.C./N.C.], [N.O./N.O.] and [N.C./N.O.].

ASR

7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Precision Regulator

. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 IR1000 series