smcmaintenancepartslist

Pressure Control Equipment P 0.25 MPa Spring washer Tightening torque (Nm) Base cylinder Tie-rod nut 200 250 125 140 180 103 160 75.5 Bore size (mm) 147.1 254 Aluminum tube Tie rod 49 Steel tube Manual release bolt 92.7 132.4 62.8 39.2 Old-lock unit Push plate bolt 11 22 38 3-5. Mount seal with care to prevent damage to it. 3-6.

10

47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 CS1 CS2 D-X Technical Data 427 A MB Series Minimum Stroke for Auto Switch Mounting Mounting Brackets Except Center Trunnion n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 50, 63 80, 100 125 Note 2) 2 (Different surfaces, same

Table of Contents

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of

LJ1H

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of

e-Rodless Actuator

FE 1 3 1 3 M1E = x FE x Z = x 34.42 x 37.8 x 103 = 0.43 (Nm) M1 Load factor 4 = M1E / M1E max = 0.43 / 21.0 = 0.02 M3E: Moment M3E max (from 5 of graph MY2H / M3) = 19.5 (Nm) .

PC Wiring System Series PCW

Input PCW-EC16XBR00 PCW-EC16XBR01 PCW-EC16ZBM00 PCW-EC16ZBM01 Output Note PCW-EC16YBR00 PCW-EC16YBR01 Circuit board type With cover (DIN rail mount compatible) Circuit board type With cover (DIN rail mount compatible) 2 Series PCW-EC Circuit Diagram PCW-EC16XBR00 PCW-EC16XBR01 [Applicable PLC example: OMRON Corporation C200H-ID218] 115 114 113 112 111 110 109 108 107 106 105 104 103 102

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve

MXQ

10 9 9 8.5 8.5 4.2 4.2 B A 16 8 16 8 H (NN 1) x H G Section AA Section BB (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103

17

= 2 x 9.8 x 30 x 103 = 0.59 (Nm) 1 3 1 3 MY3A MY3B M3E = x FE x Y = x 82.3 x 30 x 103 Load factor 3 = M2/M2 max = 0.59/1.6 = 0.37 = 0.82 (Nm) Load factor 5 = M3E/M3E max = 0.82/2.9 = 0.28 MY3M M2 Sum and Examination of Guide Load Factors 5 = 1 + 2 + 3 + 4 + 5 = 0.89 1 The above calculation is within the allowable value, and therefore the selected model can be used.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 5.

TABLE OF CONTENTS

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

VCL

62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers

VCS

74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.

Series VCL

62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve

Series VCS

74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

Air Cylinder

301 to 1500 40 37 32 50 25 40 3 20 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 86 3/8 122 100 Up to 300 301 to 1500 40 37 41 60 30 50 3 20 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 106 1/2 122 Bore size TA TC** Without rod boot With rod boot on one side* With rod boot* Female Rod End (mm) on both sides (Reference) JW H ZZ e f h IJ JH Bore size A1 H MM ZZ (Reference) l ZZ ZZ 20 8 13 M4 x 0.7 103

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

10-, 21-) Vacuum port (11-, 22-) Effective thread length FL NA Width across flats B2 G H2 NN Width across flats KA G Width across flats B1 H1 MM NA 20, 25 Eh8 D Standard port 45 Relief port (10-, 21-) Vacuum port (11-, 22-) 1.5 A AL K ZZ + Stroke S + Stroke H F 32, 40 (mm) ZZ H H2 H1 S P I G E D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K AL F 8 13 0 1/8 138 109 107 103

VK300

= Number of VK300 Grommet: G DIN terminal: D Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 78.4 68.8 Max.10 70.9 300 (Lead wire length) 2 x Rc 1/8 (P port) 2 x Rc 1/8 (P port) Pg7 n1 x Rc 1/8 (A port) 2 x 4.5 (Mounting hole) 2A 2A 2A 35 19 (Pitch) 44.5 11 (Station 1) (Station n) (Pitch) n x Rc 1/8 (R port) L Dimension n L n: Stations 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination