SV

-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ 200 50 SX 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10% 30% 50% 70% 50% 30% 10% 0 0 200 CM2 25 400 MB 40 150 300 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -02-08 AS2200-02 100 200 50 100 0

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

HRX-OM-T004

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS090 Series 5-20 HRX-OM-T004 Chapter 5 Simple communication

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

ZR

Individual spacer (ZR1-R1-2) PV V X X PD X X 110.5 105.5 X PV V 70.5 SMC 16.5 X PD 12 V V 35.5 (Pitch) 33 (Pitch) 33 35.5 PV PD EXH PS Rc 1/8 V port Vacuum port 13-3-33 33 Large Size Vacuum Module: Vacuum Pump System Series ZR How to Order Combination of vacuum switch valve and release valve Refer to Table (1).

ZSE30A(F)/ISE30A

(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats

MGG

Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke

PSxx-OMS0006CN

MPa ZSE20 5.1 kPa ZSE20F5.0 kPa 1.5ms ON OFF -26No.PS-OMS0006CN-G [F 2] [F 3] 32 0 ms [F 4] 33 [F 5] [F 6] 35 0% [F10] 36 std() [F11] 41 1000 [F80] 42 OFF [F81] 43 OFF [F82] 45 A [F90] 46 OFF [F96] [F97] [F98] 48 () [F99] 49 OFF -27No.PS-OMS0006CN-G [F 0] (kPa/MPa) <> [F 0] [F 0] ZSE20F ZSE20 ISE20 MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 2 0.001 0.001 0.01 kgf/cm bar 0.001 0.001

Air Pilot Operated Series NVSA

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Series SYJA300 3 Port Air Operated Valve

Note) Model number for base mounted style without sub-plate is SYJA5 2 and SYJA7 2. 1 2 1 2 Body ported Series SYJA500 With Bracket Model No. of air operated valve SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not assembled.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Unified thread (10-32 UNF) NPT N G F AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread. AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

VZS

Electrical entry F: Plug-in type Option Port size Nil 01 Without sub-plate Rc 1 8 50 01 F Z VZS2 1 2 Plug-in 5 G 50 VZS2 Non plug-in 2 01 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Symbol Thread type 1 2 3 2 position single 100 VAC, 50/

CG1

Rod End Nut Material: Rolled steel -03 32-01 -03 Applicable pin O.D. 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 Bore size (mm) Part No.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

VZ100/300/500

N T Rc F: With foot bracket G NPT SYJ NPTF Port size VK 01 1 8 Light/Surge voltage suppressor Note) Bracket is not mounted.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

G VX 2 2 1 21 01 G 1 1 Normally Closed (N.C.)

AS-FG/ASD-FG

Note) Use Series AS-F with -X214 for the throttle valve.