CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

LX Series Compact Electric Actuators

.);:-| I Driver unit lt lllnm --i -"r I ' I r_coo-r l]jj ,Tt-r f#posi,ioninsi I | *.!{l ). I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

CV/MVGQ

F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

CV/MVGQ

F Built-in One-touch fitting Specifications One-touch fittings are installed on cylinders.

CL

How to Order CL MLGC Number of auto switches Standard L 100 200 F JN CL1 CNA 2 3 1 n 3 S n CB L 100 200 F JN A33 CDL1 With auto switch CV/MVG Air cylinder with auto switch Auto switch CXW Without auto switch (Built-in magnet) Lock-up Cylinder Refer to table below for auto switch model.

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

•

"F: 1 , 0 F . Model M' ;8 C R ~ !F. G ;K '.

Compact 5-Port Solenoid Valve

PNP sensor input NPN sensor input Without input block Nil M12, 2 inputs A D M12, 4 inputs B E M8, 4 inputs C F * When not selecting an SI unit, the symbol will be nil. u P, E port entry, SUP/EXH block assembly P, E port entry Internal pilot Internal pilot, Built-in silencer U side (2 to 10 stations) U C D side (2 to 10 stations) D E Both sides (2 to 24 stations) B F * The 3/5(E) port is

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2 Material: Chromium molybdenum steel (Nickel plated) Bore size (mm) RQ B D E F M T1 T2 Part no.

Table of Contents

VQ1000 (VV5Q13)-Plug-in Unit, Flip Type (F, P, J, L, S kit) . VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

PFxx-OMJ0005CN

Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES

CQ2

(A type, B type) Bore size (mm) T2 B D E F M T1 Part No. 6.5 10 18 6.8 16 6 42 YA-03 32, 40 YA 03 6.5 12 20 9 20 8 50 YA-05 50, 63 8.5 16 26 11 25 10 62 YA-08 80 Applicable bore size 10.5 18 31 14 30 12 76 YA-10 100 For 32, 40 For 50, 63 For 80 For 100 03 05 08 10 Mounting bracket Weight (g) Bore size (mm) K L M Part No.

Fluoropolymer Piping Equipment

21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

Flow Control Equipment

How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

VQ4000

Nil N T F Rc NPT NPTF G Combination of manifold options shown below and external pilot specification is not possible.