Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)

Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

SY OTHER SIZE RATING. .22046 lb. 1F.

SQ1000 OTHER SIZE RATING. 0.22046 lb. 1F.

.: 15), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1F (48VAC; DIN Terminal w/Surge Voltage Suppressor), Other Options: E (Oil-free, NPT Thread)

.: 10), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1F (48VAC; DIN Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

.: 10), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1F (48VAC; DIN Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

.: 10), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1F (48VAC; DIN Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

.: 10), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1F (48VAC; DIN Terminal w/Surge Voltage Suppressor), Other Options: E (Oil-free, NPT Thread)

.: 10), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1F (48VAC; DIN Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)

.: 15), Voltage/Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 1F (48VAC; DIN Terminal w/Surge Voltage Suppressor), Other Options: B (NPT Thread)