Shock Absorbers and Rate Controls

t 9 60 60 241 l 2 l 48 76 0E113.()flx2 245 265 98 il85 x 2 69 76 l{0 70 J8 5l 0tlll3.0llx3.5 323 343 98 M 8 5 x 2 22 69 76 v9 90 58 7l Otlll3.0frlx5 399 419 90 M 8 5 x ? 22 69 76 2tl r09 58 7l Otl{13.0Iir6.5 494 514 98 l{85 x ? 22 8l 8l ?

XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

7.4

Tightening torque VQ1000FPG-FB 0.22 to 0.25 Nm 16 16 stations VVQ1000-FPG-066-station manifold Note) This torque is used to mount the bracket on the double check block.

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(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

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(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P3 (Pressure Sensor, -100 to 100kPa, Accuracy ±2% F.S.), Air

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2%

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2%

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Main Body Shape: Unit, Additional Function: Filter, Ultimate Vacuum(kPa): -74, Air Consumption Flow Rate(l/min): 12, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.2～0.5, Operating Temperature Range(°C): 5

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, -100 to 100kPa, Accuracy ±2% F.S., Air Pressure Supply, P

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: Suction Filter, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port