Clean Room Regulator/Fluoro Resin Type Series SRF30

Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

AC Servo Motor Driver (Pulse input type)

Project will be loaded. 52 - 5.9 Acquisition of motion waveform with graph monitor With the setup software (MR Configurator2TM: LEC-MRC2E) monitor graph function, the motion waveform during electric actuator operation can be obtained as described below.

AC Servo Motor Driver (SSCNET Type)

An overload alarm will occur when margin is 0%. 0.1% 17 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses. An excessive error alarm will occur when margin is zero pulses. 16pulse 18 Settling time The settling time for position control is displayed.

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

RZQ

A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical

3 Position Cylinder Series RZQ

A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical

ARM10/11

Example of mounting Bracket Flow rate (/min (ANR)) Pressure Characteristics Set nut Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 /min (ANR) ARM2500 Outlet pressure (MPa) Model Part no.

4-channel Flow Monitor ( compatible)

Set each P1/P2 (set value), referring to the Accumulated output mode on page 31.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

characteristics Note 1) Pilot port size (Nominal size) b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Weight Note 2) (g) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv 105 (42) 110 (47) Single Double Closed center 2 position 0.66 2.4 0.41 0.64 2.8 0.29 SYA540-02 M5 x 0.8 1 4 0.72 [0.37] 0.47 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8 0.33 [0.48] 0.40 1.8 3 position 1.4 3.3 [0.84] Exhaust center Pressure center 115 (52

AC Servo Motor Driver (CC-Link Type)

An overload alarm will occur when margin is 0%. 0.1% 17 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses. An excessive error alarm will occur when margin is zero pulses. 16pulse 18 Settling time The settling time for position control is displayed.

AC Servo Motor Driver (CC-Link Type)

An overload alarm will occur when margin is 0%. 0.1% 17 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses. An excessive error alarm will occur when margin is zero pulses. 16pulse 18 Settling time The settling time for position control is displayed.

ARM10/11

Example of mounting Bracket Flow rate (/min (ANR)) Pressure Characteristics Set nut Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 /min (ANR) ARM2500 Outlet pressure (MPa) Model Part no.

Clean Regulator

P1 Parts assembly Parts assembly Degrease/Wash Degrease/Wash P2 P2 Pure water (16M-cm) wash Assembly Time Time Assembly Inspection Circuit diagram Inspection Interior purge P2 P1 2 1 2 1 Interior purge Package SRH Clean booth Class 100 Package 856 Clean Regulator SRH Series ARJ How to Order AR425 to 935 ARX 02 SRH 3 0 0 0 AMR Gauge port orientation ARM Body size 3 4 1/4 3/8 Nil: Standard

Magnetically Coupled Rodless Cylinder

x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52

4/5 Port Air Operated Valve Series SYJA3000 1

center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting) 2-3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1

VFR

2 VVFS3000-3A-1 End plate (D side) assembly Note) For side ported 3-5-51 52 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3-5-52 53 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double Power Cylinder Series MGZ Dimensions with Mounting Brackets Transaxial foot type (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ X LD Y LH LT LX LY LZ 40 50 63 168 181 198 220 243 269 9 11 13 34 40 47 19

Compact Cylinder with Solenoid Valve/

Example) Lead wire length 2000 mm Electrical entry When ordering cylinder with valve CVQM32-30-M9B-5MOZ SY100-30-4A-20 M-type plug connector with lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB