XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

7.4

Tightening torque VQ1000FPG-FB 0.22 to 0.25 Nm 16 16 stations VVQ1000-FPG-066-station manifold Note) This torque is used to mount the bracket on the double check block.

o

(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

o

(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

K35-OMX0029

. *2 Ports FA and FB are plugged before shipment.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

"* (D r 1 How to Order fB(acket ln case of Type ol actuation I 2 position single 2 2 position double 3 3 position closed center 4 3 position exhaust center 5 3 position pressure center -: Without subplate M5: @@ With 10-32 Nom.(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22).

HRX-OM-R028

PV SV 22. Select response delay time (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Bore size (mm) 40 50 63 16 20 25 32 Type Side support A MY-S40A MY-S63A MY-S16A MY-S20A MY-S25A MY-S32A Side support B MY-S40B MY-S63B MY-S16B MY-S20B MY-S25B MY-S32B For detailed dimensions, refer to page 8-12-22. 8-12-16 17 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Construction MY1W o !6 !3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !

HRX-OM-T004

PV SV 22. Select response delay time (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL. Table 5.3-12 List of set values Set values Explanation Initial value (Default setting) Setting/checking are not available unless the serial protocol setting is simple communication protocol.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Bore size (mm) 40 50 63 16 20 25 32 Type Side support A MY-S40A MY-S63A MY-S16A MY-S20A MY-S25A MY-S32A Side support B MY-S40B MY-S63B MY-S16B MY-S20B MY-S25B MY-S32B For detailed dimensions, refer to page 8-12-22. 8-12-16 17 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Construction MY1W o !6 !3 !1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !

-fl Seies

Recommended terminals NVFR 2000, 3000: 1.25-3, 1.25-35, '1.25Y-3N, 1.25Y-3S (1.25mm centers) (spade type, size 4, 22-16 AWG). . NVFR4000: 1.25-3.5M. 1.25Y-31. 1.25Y-3M. .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Recommended terminals NVFR 2000, 3000: 1.25-3, 1.25-35, '1.25Y-3N, 1.25Y-3S (1.25mm centers) (spade type, size 4, 22-16 AWG). . NVFR4000: 1.25-3.5M. 1.25Y-31. 1.25Y-3M. .

3-Position Rotary Table

DK (through) DH DI DJ DK DL FE HA UV Size 10 20 30 50 45h8 46h8 20H8 6 15H8 10 18.5 52.5 60h8 61h8 28H8 9 17H8 15.5 26 63 65h8 67h8 32H8 12 22H8 16.5 27 67 DL 75h8 77h8 35H8 13 26H8 17.5 30 76 (mm) AA A AV AW AX AY AZ BA BB BC CA CB CC D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 D7 24.7 50 14 17 8 1 9.5 60 27 7 7 38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5

Add to Cart SMC AXT100-DR-21 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $11.67 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-22

Add to Cart SMC AXT100-DR-21 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $11.67 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-22

Add to Cart SMC AXT100-DR-21 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $11.67 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-22

Add to Cart SMC AXT100-DR-21 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $11.67 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-22

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: F (Suction Filter), Pressure Sensor Specs: B (w/o Pressure Sensor), Air Pressure Supply, P Port