VQC

6 4 Shield ground SHIELD 9 Optical fiber (reserve) RTS 12 Pin no. 3, 5, 7, 8, 10 and 11 marked with "" are open.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Digital Flow Switches, Series PF2A, Series PF2W

Note 6) The flow switch is comformed to CE mark. 12 Series PF2W How to Order Remote Type Sensor Unit PF2W5 20 03 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10 to 100l/min Nil 1 2 04 20 40 11 Output specification Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20mA) Thread type Wiring

ZP

Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection Rc 1 8 Rc 1 8 Rc 1 8 M4 M5 M6 M8 M5 M6 M8 M5 M6 M8 M4 M5 M6 M8 Rc 1 8 Model ZPT02 to ZPT08 (3.5) except 2, 4 2.5 (3) except 2, 4 3.5 () except 2, 4 (3.5) 2.5 (3) 3.5 () ( )( )( ) 10 (7) 10 (6.5) 12 (6) (13) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (

ZP

flats 12 Hexagon width across flats 10 Applicable tubing O.D.

ZP

32 40 50 ZP50U 53 7 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

6 8 10 12 12 10 6 8 10 Tubing O.D.

5 Port Air Operated Valve

) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

4/5 Port Air Operated Valve Series SYJA3000

Type 21P (5 Port/Body ported) How to Order SS5YJ721P 05 A, B port Applicable blanking plate assembly SYJ7000-21-3A A B P, R port thread type A B Stations A B A B P port 1/4 03 3 stations Nil F N T Rc G NPT NPTF : : Applicable connector assembly Refer to page 1-5-62. 12 12 stations R port 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

3 Port Air Operated Valve

608 656 641 689 674 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 Type 42/Individual exhaust: VV3PA5-423-03 Stations (Pitch) P = 33 3/8 3(R) port 31 28.5 3R 3R 12 92.5 2 x 7.2 (For mounting) N.C.

Hydraulic

36 44 M4 10 10 13 13 10 10 12 12 12 12 12 16 7 7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

Compact Cylinder with Air Cushion Series RQ

Mounting bracket A type mounting bracket B type mounting bracket Joint YA YB YU 18 6.8 16 6 42 6.5 10 YA-03 32, 40 20 9 20 8 50 6.5 12 YA-05 50 Bore size (mm) U V W Weight (g) Part no.

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model VCHC 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 ASR ASQ 10-32 UNF 8 10 11.7 7.8 29.6 33.8 30.1 34.6 25.1 28.8 9.6 3/16" ASD230FM-U10/32-05 35.2 23.3 16.5 14 11.4 1/4" ASD330FM-U10/32-07 32.6 20.7 13.5 15 12 14 34.6 39.6 3/16" ASD330FM-N01-05S 39.5 23.9 16.5 30 11.4 12.7 11.8 10.6 35.2 32 1/4" 27 NPT 1/8 ASD330FM-N01