CP95

CA2 See pages 6-13-10 to 11 and 18 for dimensions. See page 6-13-10 and 18 for dimensions. Note) See page 6-13-11 for male head side clevis with swivel CR50.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.5 5.5 11 H (NN 1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 782 MXS 1322Air

JXCx-OMU0004

] OUT3 ONIN02 ON7 (3) OUT0 ON OFF bit_0 OFF ON OUT1 [12] BUSY ON OUT3 OFF bit_1 [13] STOP OUT2 ON OFF [14] OFF BUSY ALARM OFF bit_2 OUT3 ON OFF [15] BUSY ALARM OFF STOP OFF bit_3 [16] ONALARM ON OFF ON BUSY [17] ALARM ONIN03 ON9 OFF ON ALARM 0 48 No.JXC-OMU0004-A 9.4 ) 1011 11 10 53 97 (1) NO.10 No.10 (2) NO.11 No.11 No.11 NO.11 (3) (1) 10 11 9 7 (2) 11 9 7 (3)

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

0.4

12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for 4-M4 Manual release

MGG

size (mm) W V U T O P S Z X Bore size (mm) Bore size (mm) Y R HR HN Q Y R Q 20 25 32 40 50 40 48 82 12 M6 x 1 depth 9 Rc 1/8 26 157 30 20 25 32 40 50 20 25 32 40 50 11 25.3 12 (14) 21 37 47.5 107 (115) 104 46 57 100 13 Rc 1/8 M6 x 1 depth 13 31 175 37 11 28.3 12 (14) 21 40 104 48 107 (115) 52 65 114 16 Rc 1/8 M6 x 1 depth 13 38 201 37 11 31.3 12 (14) 21 43 106 49 110 (118) 62 84 138 Rc 1

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

CJ2

CJ-CF006 CJ-CR006 M3 x 0.5 6 6 8 11 8 5 6 10 CJ-T010B CJ-CF010 CJ-CR010 3.3 M4 x 0.7 10 8 10 13 10 6 8 29 2 9 4.5 3.1 18 40 22 32 12 8 +0.048 0 16 CJ-T016B CJ-CF016 CJ-CR016 5 M5 x 0.8 16 10 12 15 7 12 10 35 14 5.5 6.4 2.3 20 48 28 38 16 10 +0.048 0 6-3-11 12 12 Series CJ2 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Auto switch Solid state switch

Swivels

Hex 1 Hex 2 Port 1 Port 2 A Port 2 PS49JMJM-4-4 2.99 2.59 1.29 1.89 1.20 .75 .56 9/16-18 9/16-18 76.0 mm 65.7 mm 32.5 mm 47.9 mm 30.5 mm 19.0 mm 14.3 mm UNF-2A UNF-2A DIA B PS69JMJM-6-6 3.27 2.76 1.40 2.05 1.29 .88 .69 11/16-16 11/16-16 83.0 mm 70.0 mm 35.6 mm 52.0 mm 32.8 mm 22.2 mm 17.5 mm UN-2A UN-2A Hex 1 Hex 2 C PS89JMJM-8-8 3.52 2.93 1.74 2.60 1.73 1.12 .88 13/16-16 13/16-16 89.5 mm

SZ3000

8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5

MXS

Model CXS A B C D E E1 F H J K L G P* Q* M MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BS 8 7 23 14 15.5 40.8 5 12 16.6 7 15.5 14.6 1.4 M8 X 1 M3 X 16 M3 X 16 CXT MXS-BS12 9.5 31 14.5 16 40.8 6 12 20.5 10 15 18.5 1.4 M8 X 1 M4 X 15 M4 X 15 MXS-BS16 11 37 17.5 19 46.7 7 14 23 12 18.5 21 1.4 M10 X 1 M5 X 18 M5 X 18 MX MXS-BS20 13 47 23.5 26 67.3 11 19 27 13 25.5 25 12 M14 X 1.5 M6 X 25 M6 X 25 MXS-BS25

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 P (Piping port) Model Mounting Nut/Included in the package (2 pcs).

CG1

11 10 (11) 10 (12) 12 (13) 12 (13) 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 10 (12) 20 25 32 40 50 63 80 100 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 26 31 38 47 58 72 89 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 12 14 18 25 30 32 40 50 14 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 69 (77) 69 (77) 71 (79) 78 (

HRX-OM-X037

Circulating fluid flow rate [Flow PV]. 5-11 Circulating fluid flow rate [DI PV]. 5-11 Operation mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-14 5.4.4 Information screen . 5-16 Alarm reset . 5-17 Alarm name . 5-17 Alarm log record . 5-18 Display of alarm/maintenance reminder . 5-19 5.4.5 Check operation time screen and maintenance

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Table of Contents

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly