ZP3 With bushing K Non-rotating Width across flats 10 M8 x 0.75 (Buffer body) 22 2 2 C B M5 x 0.8 Effective thread depth 4 Model A B C Vacuum inlet direction q Pad dia.
VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.
Body size Port size M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK2P-M5M -01MS KK3P-01MS -02MS -03MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK2S-M5M -01MS KK3S-01MS -02MS -03MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS M5 x 0.8 R 1/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type
Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
Bore B C d H NTJ-015A 10 16 NTJ-010A 7 8.1 M4 X 0.7 3.2 8 9.2 M5 X 0.8 4 Clevis pins and set rings are attached.
Standard motor cable length 12mm 20mm B C Cable entry direction 2m 3m 4m 5m 2 3 4 5 Motor output: 50W Lead screw type Axial Right Left Top Bottom F R L T B Power supply voltage Refer to Table below.
port with sub-plate M5 3 position closed center JIS Symbol 5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3
R R ot ot of e g k n e ra at at y w n io io CRQ2 a io y n n at A 1 n ra gl ra ot 8 e A a A 0 n n R dj n n g gl g gl u e st e e e in a a of of dj dj g MSQ k k u u di st st e e r y y in in e w w ct g g Angle adjusting screw a a io di di y y MSZ n r r 9 9 e e 0 0 c c ti ti o o CRQ2X MSQX n n MRQ Angle adjusting screw Angle adjusting screw The rotation range under the adjustment of an angle
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use
side D side 2 x G3/4 Conduit port VQ 1/2 C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamp screw VQ 4/5 R R 77.7 62.5 12 X 3 12 X 3 45.5 40.5 VQC 1/2 VQC 1/2 B B B B B B B B 25 P P 1 1 A A A A A A A A VQC 4/5 18.7 7.7 9.5 35 (7.5) (12) C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8: 8 One-touch fitting C8
SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79
Pressure Control Equipment D B K P C C C K U P O S A A H L C to U S O H L to B D !0 o D-D C-C B-B A-A !0 o !1 !1 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters y y q IN OUT IN OUT u r t u r t i i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG.
-PR M5 x 0.8 (X: External pilot port)
C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds
, 16 Mounting nut Piping port M5 x 0.8 Rod end nut Piping port 2 x M5 x 0.8 Cover surface B 0 -0.3 Mounting hole Port location on head cover: Axial location (R) S + Stroke Z + Stroke For details of the mounting nut, refer to page 1250.
Nil R Internal pilot External pilot Type of actuation 1 2 3 4 5 A B C External pilot spec. is not applicable for 4 position dual 3 port valves. A, B port size Coil spec.
Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.
CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R D-X Individual -X 579 Series CXS Construction: Slide Bearing CXSM6 q e r u !
7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions