Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

10

J dimension is different from the value which is subtracted stroke from G dimension. 8 MHL2 Series Dimensions MHL2-16DmZ 8 8 10 2 x M5 x 0.8 thread depth 7 (Mounting thread) D Closed J View K (Fingers closed) The above figure shows the MHL2-16D1Z/16D2Z.

Modular F.R.L. Unit

N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

MRHQ

2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

K + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115

Title not found

-r DIN rail length Valve :l'"T,T;'fi":il"** :lloo,,"*,.s oec,,cl:on I l";]l;il"'fl:,^ii,lli' ffi!";:lffi | l ooraro barefe,.J r^Kb\,:r. I E Jr o.6roonoo(oosscte I =r..r'r,i;F,ro*"r,rewlrn+sy.:4IE19"'utrqr"Llliillilillii|l a r o ^ : r . . !

CE

stroke 25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

J Mounting bracket part no.

Compact 5-Port Solenoid Valve

For EX600/EX250 pp. 63, 77, 119 1 3 5 S6 S JJ5SY 10 G P, E port entry, SUP/EXH block assembly P, E port entry External pilot U side (2 to 10 stations) G D side (2 to 10 stations) H Both sides (2 to 24 stations) J How to Order Valves JSY T 0 0 5 1 R 3 5 R JSY 0 0 5 Coil type (See below.)

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 Auto switch mounting groove (4 locations) 204-M8 x 1.25 (Piston rod and rack screw) Width across flats 13 (4 locations) Closed E Open F 4-M8 x 1.25 through (Thread for mounting attachment) (mm) A B C D E F G H 66 120 138 J 146 244 282 Note 1) J dimension is at fully closed.

MVGQ

x 0.8 R port (with plug) MK(2) RS Q G 54.4 (GZ: 55.1) [56.1] RS H A RZQ MI W S M5 x 0.8 P port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

JA/JAH/JB/JS

C J G5-S JAHL63 to 100 Center of sphere CV MVGQ CC RB R J (mm) Maximum operating tension and compression force (N) M Allowable eccentricity U Center of sphere R Applicable bore size (mm) Model Maximum thread depth P DWeight (kg) A B C D E F K L T N J G H Nominal size Pitch -X Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAHL40-16-150 JAHL50-20-150 JAHL63-24-150 JAHL80-30-150 JAHL100-39

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45

CXS

-50 15 Series CXS Dimensions: 10, 15 Stroke ZZ SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G 0.2 (G) H A P 6.3 5 X (Hexagon socket head cap screw) F (Through) N M4 x 0.7 x 14.5 (Hexagon head bolt) M4 x 0.7 (Hexagon nut) E V (Opposite side: Same) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) (L) (Z) 5 QQ C Q R 8 (I) (L) (Z) U N (G) NN (mm) V A B C D E F G H I J

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.