Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (A, B port) 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage suppressor) + 23 20 12.7 28.1[35.1] 3 11 2-2.6 (For mounting) P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5223-L-M5 M plug connector (M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

15

Workpiece fixed/Plate tapped type Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M6 x 1.0 5.2 11 LEYG32M L M6 x 1.0 5.2 12 Tap (4 locations) Body fixed/Top mounting Model Screw size Max. tightening torque [Nm] Length: L [mm] LEYG25M L M5 x 0.8 3.0 40.5 LEYG32M L M5 x 0.8 3.0 50.5 2.

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(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

V

M5 M5 Thread VA LV E O P T I O N Standard (2W) V* Vacuum (2W) U* High Flow (4W) W High Flow, Vacuum (4W) *Power Saving Type E L E C T R I C A L E N T R Y L Plug Lead Type L Type Plug Connector with Lead Wire; w/Light and Surge Suppressor LO Plug Lead Type L Type Plug Connector without Lead Wire; w/Light and Surge Suppressor M Plug Lead Type M Type Plug Connector with Lead Wire; w/Light and

ZP

Form w 1 Material e Vacuum inlet r Connection thread N S U F GN GS Width across flats 10 A5 66.5 M5 x 0.8 21 4 3 ZP R 06 08 B 04 06 A G A6 71.5 M6 x 1 26 4 4 Width across flats 7 Dimensions Per Vacuum Inlet M5 x 0.8 29.4 Model E F G Vacuum inlet direction q Pad dia. Form w 1 Material e Vacuum inlet r 20.5 Applicable tubing O.D.

CRB2/CRBU2/CRB1

A B C D G E (g6) F (h9) S2 S1 R N M T U V W X Y L K H Model CRBU2WU15-D 5 0.004 0.012 0 0.043 M3 x 0.5 3.5 21 3 M5 x 0.8 29 10.5 34 10.5 36 0.5 48 25 3.2 21.2 10 18 15.5 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 M4 x 0.7 4.5 26 M5 x 0.8 4 11 36 44 42 11.5 59 34.5 0.5 25 10 4 17 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 M5 x 0.8 5.5 29 M5 x 0.8 4.5 13 42 12 52 50 69 47.5 1 4.5 29 12 22 17.5

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block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

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(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 1.5 18 21.2 25 3.2 34 48 36 29 3 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 12 CRBU2WU20-D 0.004 0.012 0 0.043 1.5 20 25 34.5 4 42 59 44 36 4 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 2 22 29 47.5 4.5 50 69 52 42 4.5 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8

AC

VBA200: Qb = 500 [l/min(ANR)] VBA400: Qb = 1100 [l/min(ANR)] Avoid pulsation Max. 0.05MPa NO VBA400 NO Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. L W Tc[s] = Select tank from table below.

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S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

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ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRB2 Dimensions: 40 Single vane type/Double vane type CRB2BW40-S/D M5 x 0.8 depth 10 3-M5 x 0.8 depth 10 56 3-M5 x 0.8 depth 16 25 25 M5 x 0.8 depth 16 5.5 depth A port B port 11.5 10 g6 -0.005 -0.014 2 20 0 -0.030 4 6.5 10 30 45 Body B (mm) (90) h Keyway dimensions b l Body A l h (h9) b (h9) Series CRB2BW400 0.030 4 20 0 0.030 4 15 2-M5 x 0.8 Connection

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 1.5 18 21.2 25 3.2 34 48 36 29 3 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 12 CRBU2WU20-D 0.004 0.012 0 0.043 1.5 20 25 34.5 4 42 59 44 36 4 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 2 22 29 47.5 4.5 50 69 52 42 4.5 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

12.7 11 3 28.1 [35.1] P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4 5 DIN terminal (D, Y): 10-SYJ5 23-M5 M8 connector (WO): 10-SYJ5 23-WO-M5 3 4 5 3 4 5 D Y Approx. 300 (Lead wire length) Applicable

Air Cylinder

With air cushion GA WA GB WB 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH W 10 With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke ZZ + l + Stroke h + l h + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D E F FD FT FX H H1 I J K Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 40 13 14 8 12

Electric Actuators

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 10 LXP M6 x 1 7.4 12 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

SQ1000/2000

L RUN SERIAL UNIT L ERR.