F A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P
M kit is available with [W] only. S/L/T kit are selectable depending on the manifold type. Note) F/P/J/G kit are available with Nil only. M kit is available with [W] only. S/T kit are selectable depending on the manifold type. S Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Option Note 1) The !
M kit is available with [W] only. S/L/T kit are selectable depending on the manifold type. Note) F/P/J/G kit are available with Nil only. M kit is available with [W] only. S/T kit are selectable depending on the manifold type. S Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Option Note 1) The !
4 w !3 !0 r e u t 426 B
Exploded View of Manifold
(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.
q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.
6 t !0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Note Hard anodized Material Aluminum alloy No.
7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !
e q t IN OUT e q r IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.
Male branch tee W Extended male elbow Y Male run tee U Branch Y Sealant/Gasket Seal Face Seal Gasket Seal Port size Symbol Size 01 R1/8 02 R1/4 03 R3/8 04 R1/2 Applicable tubing O.D.
0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
) UM:-A12-06 ZP3-T (10/13/16) B:-A12-06 ZP3-T (015/02/035) U:-A3 ZP3-T (015/02/035) U:-B3 ZP3-T (015/02/035) U:-A6-@ ZP3-(015/02/035)U: ZP3A-T1-A3 ZP3A-T1-B3 ZP3A-T1-A6-B3 ZP3A-T3-A5 ZP3A-T3-B5 Note 1) ; in the table indicates the pad material.
Example) 90-AW30K-03B-1N q w e r t y Series compatible with secondary batteries 90 Material restriction q Symbol Body size Description 30 40 60 w K With backflow function With backflow function + Nil N F Thread type Rc NPT G e + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 r Port size + Nil B Note 2) Note 1) Mounting Without mounting option With bracket With set nut (for panel fitting) a Option t H +
-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B
to 6 t t Pilot valve assembly Double/3 position Pilot valve assembly Double/3 position Note) (H): 1.5 W, (Y): 0.5 W Note) (H): 1.5 W, (Y): 0.5 W 2-4-223 Series VQ Construction: VQ0/Plug Lead Unit Metal seal Rubber seal type Component Parts Component Parts Note q w e Note q w e Material Material No.
T.T.=2.5mm only, w/threads Plunger Spring Valve rod Body u i w e Stainless steel Lever Valve NBR o NBR Packing r Polyacetal Retainer t Stainless steel Spring !