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Dust proof Dust tight, Splash proof Nil W 5 Series VQ5000 Base Mounted Type Dimensions (mm) 1in = 25.4mm Plug-in Type Conduit terminal 2 position single: VQ510 0 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 (Port A) 17.5 13.5 (Port B) 2-3/8 (ports R1, R2) Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 66 40 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole

(58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

66 Vacuum Module: Ejector System Series ZX Ejector System/Manifold Disassembly from Individual Unit Manifold disassembly from individual unit Philips screw 1.

107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on

(11-, 22-) G H2 G H1 Width across flats B1 MM FZ FX Eh8 D I 20 to 32 Width across flats KA Relief port (10-, 21-) Vacuum port (11-, 22-) (32,40) Standard port 45 Width across flats NA FT K A AL 1.5 Z H ZZ + Stroke S + Stroke F FY 4 x FD 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5 28 FL Z H H2 H1 S P I F C2 A ZZ 66

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

N (Example) R73CN 66 Rotary Actuator Vane Type Series CRB1 Specifications Excellent reliability and durability The use of bearings to support thrust and radial loads improves reliability and durability. The body of the rotary actuator can be mounted directly. Two different port positions (side and axial) are available.

D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66

107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

For details, refer to page 9-15-66. 9-5-22

In the unlikely event that malfunction is caused by ground, please disconnect the unit from ground. 66

102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (7) Body mounting reference plane Note 1) LEF 45 38 LEJ LEL 50 3.5 3H9 ( ) depth 3 +0.025 0 LEM Motor option: With lock LEY (2.2) L Encoder cable (7) (52) A (Table traveling distance) Note 2) Motor cable (7) (169) 52 58 LES Stroke (54) (56) 10 (209) 38 21 Encoder Z-phase detecting position Note 3) (4) LEPY LEPS 38.5 48 24 66

Refer to the Electrical Circuits on page 66 and be careful not to reverse the polarity. Component Parts No.

gauge Model Metal bowl Metal bowl with level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 106 106 106 106 106 53 70 75 90 95 70 70 70 70 70 66 66 66 66 66 25 18 16 35 35 11 11 11 11 11 3.2 3.2

107 116 135 50 24 40 40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of

66 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Solenoid Valve Base Mounted Series VZ5000 How to Order VK Light/Surge voltage suppressor VZ Type of actuation Manual override VF Electrical entry Rated voltage Body option Port size Note) Please contact SMC in the case of without indicator light.

gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 85 26 35 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5