Modular Type Lubricators Series AL

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

3 kPa)1 l/min (ANR) or less (at P2 = 0.4 MPa)0.6 l/min (ANR) or less (at P2 = 0.2 MPa)1.4 l/min (ANR) or less (at P2 = 0.6 MPa)1/4?5 to 60C (No freezing)?5 to 50C (No freezing)Bleed type0.5

VQ4000

15 ARBQ4000-00-B A EA 18 40 40 Effective area at exhaust side (mm2) S at P2 = 0.5 MPa 0.7 Outlet pressure (MPa) 0.6 B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the solenoid valve.

VQZ1000/2000/3000

Cylinder side pressure (P2) I N I N O UT O UT Specifications 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m Maximum operating pressure Minimum operating pressure Ambient and fluid temp.

VZS

Plug-in type Cylinder side pressure P2 (MPa) The combination of VZS2150, VZS2250 and a double check spacer can be used as prevention of falling at the stroke end but cannot hold the intermediate position of the cylinder.

KJ

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

High Vacuum Angle Valve, XL Series

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).