CNA

G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC

CNA

G59W G5PW K59W G5BA G59F 100 V Relay, PLC Grommet Reed switch Solid state switch PLC 100 V, 200 V Yes Relay, PLC 12 V PLC 24 V 2-wire 100 V Relay, PLC 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 24 V 5 V, 12 V Grommet 5 V, 12 V 12 V 100 V, 200 V 2-wire 3-wire (NPN) IC circuit Terminal conduit 12 V 2-wire Relay, PLC

LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

XL

-16 XL(A, C, H) [V]-25 XLD [V]-25 XL(F, G) [V]-16 XL(F, G) [V]-25 XLD [V]-40 XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

MNB

, PLC 100 V, 200 V Yes Yes 12 V Terminal conduit PLC 24 V 2-wire 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication

90

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

MNB

PLC 100 V, 200 V Yes Yes 12 V Terminal conduit PLC 24 V 2-wire 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal conduit 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

2–4

IC circuit 5 V A76H A96V A96 Yes A72 A73 A80 A72H A73H A80H 200 V Solid state switch Reed switch Grommet 100 V 12 V IC circuit A90V A93V A90 A93 5 V, 12 V 12 V 12 V No Relay, PLC 2-wire 24 V Yes Connector A73C A80C A79W F7NV F7PV F7BV J79C F7NWV IC circuit 5 V, 12 V No Grommet Diagnostic indication (2-color display) Yes 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F9NV F9PV F9BV M9N M9P M9B 5 V,

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

CL

V IC circuit 5 V, 12 V 40 to 160 40 to 100 Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) Terminal conduit 5 V, 12 V 40 to 100 40 to 160 Relay, PLC 12 V 2-wire 3-wire (NPN) 5 V 12 V IC circuit Diagnostic indication (2-color indication) 24 V 3-wire (PNP) 40 to 100 12 V Grommet 2-wire Water resistant (2-color indication) 40 to 160 With diagnostic output (2-color indication

0.5

Ground the F.G. cable with a resistance of 100 or less +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V 0 V 0 V DC/DC Power supply 24 VDC Power supply 24 VDC Blue (2 pcs.) 0 V 0 V 0 V DC/DC 0 V Blue (2 pcs.) 0 V 0 V F . G. F . G.

SZ3000

0 V 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .