Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø1/4" One-touch Fitting, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø6 One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø1/4" One-touch Fitting, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: ø6 One-touch Fitting, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

KB

D L A2 A1 M Part No.

VCC

.: XT13-406-X200) Note) Applicable to special manifold, too. 644 Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve) VCC Series VCC Series I N D E X P.646 How to Order P.648 Specifications/Weight P.650 Dimensions Single valve unit P.651 Manifold P.652 SUS316L Stainless steel fittings P.654 Special Tools VNA VNB Disassembly/Assembly/ Maintenance Procedure P.656 SGC

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 503 Series LVD Dimensions Basic type A D L K 4 x M (Q) 2 x P One-touch fitting Breathing port PB H C PA G A B N E J B (F) T 2 x U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

High Power Cylinder:

Auto Switches/Refer to p.5.3-2 for further information on auto switch.

CEx-OMG0106

Connect head cover tubing wisely with consideration of surrounding conditions. 15 Driving Direction Left Right Brake O per ating P ort Brake Release P ort Head Cover-WL Head Cover-WR Tube Part No. 1 2 3 4 5 6 Head Cover Type Head Cover-WL Head Cover-WR Tubing Side Front Side Bottom Front Side Bottom Driving Left A C E G I K Direction Right B D F H J L Note

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

EXxx-OMS0026CN

A IN L/A IN L/A OUT LINK L/A INL/A OUT 11 OUT L/A OUT RUN L/A IN L/A OUT LINK MS [](64 ) RUN MS: LED 27 MS: SI NS: IP IP [IP ]( 19 ) 12 PLC PLC SI TM NS: EtherNet/IP PLC PLC SI TM NS: EtherNet/IP NS: IP IP [IP ](19 ) -38No.EX-OMS0026CN No.