Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

A_HEC-OM-K001

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P

MGP

) P5DW P. 63 Note 1) Lead wire symbols 0.5m .

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Symbol Output specifications Part no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

R 13.7 2-M5 x 0.8 (ports P, R) 24 See grommet type for other dimensions.

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

o

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

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(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

High Vacuum Angle Valve

, 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

air-filter-e

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

Air Preparation Equipment

Pressure Control Equipment Industrial Filters P.245 AMG Water Separator P.246 AFF Main Line Filter P.247 AM Mist Separator P.248 AMD Micro Mist Separator P.249 AMH Micro Mist Separator with Pre-filter P.250 AME Super Mist Separator P.251 AMF Odor Removal Filter Industrial Filters 1 Indication of replacement of elements, inspection items P.253 2 How to arrange replacement element kit number

Rotary Actuator

Single vane Double vane 90, 100D 270S 180S 90S 0 5o g e n a 2 0o r 7 +4o 0 n +4o o o g n e o 0 a ti r 1 0 0 8 0 n a 9 0 o 1 +4o o t ti +4o e o a 0 g e t R n 0 o g a R o r n 0 n 9 ra o ti e a n g t io o n R at a r ot n R o (90o) (90o) ti a t o R Chamfer Chamfer (45o) Chamfer (45o) B port Chamfer A port B port A port B port (40o) B port A port A port For size 40 actuators, a parallel key will

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~ "~ R f-:: h r~~ h \ I 1I : tIlw ';1 ' t:rI D I-=' ~ ~ ::;: P , ~ \ -.-J ~ 0!.. A F N N CT I---"-: Kl.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

Air Cylinder Series MB

CLM2 CLG1 Taper ring Steel ball CL1 P MLGC f CNG R R MNB CNA CNS CLS CLQ RLQ MLU Manual override for unlocking Even if the air supply is blocked or exhausted, lock release is possible. The fail safe mechanism locks again when the manual override is released.

Electric Actuator

Left Right Nil S R Without cable Standard cable 2 Robotic cable (Flexible cable) R: Right 1 The standard cable should be used on fixed parts.

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL