EXxx-OMW0014CN

8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 4 No.EX-OMW0014CN-A / *3) 1 1.5 3) 1 1 5 No.EX-OMW0014CN-A () () () () 6 No.EX-OMW0014CN-A / () * UL , UL1310 Class2 7 No.EX-OMW0014CN-A * IP65 / *() SI SI SI () ()SI SI * IP65 EX245-SPN1A/EX245-SPN2A //M12 I/O EX245-SPN3A / 7/8 M12 M12 I/O SI ( ) () 8 No.EX-OMW0014CN-A CE * SI IO IO *

Digital Flow Switch (Remote type monitor unit)

The set values of auto-preset mode are calculated as follows Auto-preset set value Hysteresis Mode Window comparator mode P_1=A-(A-B)/4 H_1=(A-B)/2 (n_1=B+ in reversed output mode) P1L=B P1H=A H_1=5 digit 1 digit means the minimum set unit (In reversed output, P1L, P1H becomes n1L, n1H Set A-B value 4 respectively) Refer to the list of output operations (page 26) for the setting of hysteresis

Precision Regulator

Setting knob Setting spring Diaphragm (A) Fixed orifice Flapper Diaphragm( B) Nozzle Diaphragm (C) SUP.side passage BLEED Exhaust valve Exhaust OUT SUP Main valve Valve guide F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(B) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.

ISE70/75/75H

Note Bracket B and the bracket assembly make up one set.

High Purity Fluoropolymer Needle Valve Series LVN 1

(Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below. A SMC LVN30 S 10 08 B Different dia. tubing size (B side) Applicable tubing size (A side) 17-5-132 2 Series LVN High Purity Fluoropolymer Needle Valve Standard Specifications Model LVN20 LVN30 LVN40 Tubing O.D.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Precision Regulator

Flapper Diaphragm(A) Fixed orifice Diaphragm(B) IN Nozzle BLEED BLEED Exhaust valve Diaphragm(C ) SUP. passage SUP OUT Main valve Valve guide Adjusting spring N/m Fi xed ori f i ce Screw displ m S UP For ce N Fo rce N Nozzle flapper MPa/ m Diaph.(B) m2 Main valve MPa/ m (S) 1 1 Daiph (A) m2 press Press Press. Displ m Displ m spring Compd. spring Compd.

Series AS-FM/AS-M/ASD-FM

Material 1 2 3 4 5 6 7 8 9 10 NBR Body A U-seal PBT NBR Elbow body U-seal PBT Black POM, Stainless Note 3) Handle Cassette PBT Note 1) Electroless nickel plated NBR Body B Seal Brass Electroless nickel plated NBR Body B O-ring Brass Electroless nickel plated NBR Needle O-ring Brass Electroless nickel plated NBR Seat ring O-ring Brass Electroless nickel plated NBR Needle guide O-ring Brass

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Note Bracket B and the bracket assembly make up one set.

Clean Air Module

Bushing Connecting bracket B Restrictor assembly Connecting bracket A Flow direction arrow Connecting bracket B r Mount the connecting bracket A, and tighten the hexagon socket head cap screw with the following torque.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 2 pcs. 1 pc. n pcs. 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

lVFl 10

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

End Lock Cylinder Series CBG1

Mounting brackets Nil S n Manual override N L Non-locking type Locking type Basic type Axial foot type Front flange type Rear flange type Front trunnion type Rear trunnion type Clevis type B L F G U T D Auto switch type Lock position Nil Without auto switch (built-in magnet) H R W Rear lock Front lock Double locks Not available on 80 and 100.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Compact Vacuum Unit Ejector/ Vacuum Pump System

button (DOWN) S button (SET) Press this button to change to either mode and to set a set value. 17 - Doc. no. ZB-OM00201-B Mounting and Installation Note the following points when mounting and installing the product.

ZL3-OM00801

2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [Hz] 5 [DCV] 24 10 [W] 0.4 *1 JIS B 8419:2010 20 9.3 9.4 GZ33