Digital Flow Switches Series PF2A

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

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Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

3

(PF2A7H: 0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) Monitor unit 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 2% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 1% F.S. (Fluid: Dry air) Analog output: 3% F.S. 1% F .S. (PF2A70, PF2A7H) 2% F .S. (PF2A71) 1% F.S. (Fluid: Dry air) Analog output: 5% F.S. Monitor unit 0.1% F.S.

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Operate in an ambient temperature range between 0C and 50C. 3. Operate in an ambient humidity range between 35% to 85% (with no condensation).

ZR

Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.

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CCVS10-U1 Option Specifications Combined valve Control valve Stop valve, Skip valve Specifications Throttle valve Flow control valve Small flow Large flow Small flow Large flow Timid flow Small flow Large flow 0 to 0.7 MPa 0 to 0.7 MPa 0.3 to 0.7 MPa Operating pressure 0.3 to 0.7 MPa External pilot pressure 1.05 MPa Proof pressure 5 to 50C Ambient & Fluid temperature Turbine

2/3 Port Valve

Normally closed Normally open VNA01 VNA02 VNA03 Valve Double acting Pressure range Lubrication Temperature Style External pilot air 5C to 50C(Air operated: 60C) Note 1) No freezing Note 2) Lubrication is not allowed in case of seal material EPR.

Digital Flow Switch Series PFA For Air Series PFW For Water

10l/min 5 to 50l/min 20 to 200l/min 50 to 500l/min Flow rate measurement range Minimum setting unit 1% of maximum flow rate l/min, CFM x 10Accumulated flow l/min, CFM x 10Real-time flow rate Display units Note 1) l, ft x 10Operating pressure range Withstand pressure Pressure loss 0 to 0.5MPa 1.0MPa 10kPa (at 200l/min) 30kPa (at 500l/min) 3kPa (at 50l/min) 3kPa (at 100l/min) 0 to 9l 0 to 50C

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

VQZ1000/2000/3000

Cylinder side pressure (P2) I N I N O UT O UT Specifications 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m Maximum operating pressure Minimum operating pressure Ambient and fluid temp.

PF2D

Repeatability Note 4) 2% F.S. (0 to 50C, based on 25C) Temperature characteristics For measured value display: 4-digits, 7-segment LED (Orange) For channel display: 1-digit, 7-segment LED (Red) Display method Status LEDs Illuminates when output is ON OUT1: Red Enclosure Operating temperature range Operating humidity range IP65 for the front face only, the rest is IP40.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

Modular F.R.L. Units

Recommended lubricant [AL] Class 1 turbine oil (ISO VG32) Bowl material [AW/AL] Polycarbonate Bowl guard [AW/AL] Semi-standard (Steel) Standard (Polycarbonate) Construction [AW] Relieving type Weight [kg] 0.33 0.63 1.15 1.25 3.21 3.36 1 Pressure gauge connection threads are not available for F.R.L. unit with a square embedded type pressure gauge or with a digital pressure switch. 2 5 to 50C

Modular Design with Uniform Body Style

. *2 5 to 50C for the products with the digital pressure switch *3 For the following conditions in accordance with [Test condition: ISO 8573-4:2001 compliant, Test method ISO 12500-3:2009 compliant] Conditions: When a new element is used, and the flow capacity, inlet pressure, and the amount of solid bodies on the filter inlet side are stable *4 The compressed air purity class is indicated

Electric Actuators

5 to 50C 5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric power 180VA 300VA 300VA 300VA 640VA 180VA 300VA 640VA 180VA 300VA 640VA 640VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008

VFR

Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.

70pvpump

: based on 25C) 2% F .S. or less (0 to 50C: based on 25C) 5% F.S. or less (0 to 60C) ZSE30: 0.2 F.S. 2 digits or less ISE30: 0.2 F.S. 1 digit or less Repeatability 1% F.S. or less 0.2% F.S. 1 digit or less 0.5% F.S. 0.2% F.S. 1 digit or less Hysteresis mode: Variable Window comparator mode: Variable Hysteresis mode: Variable Window comparator mode: Variable Variable 1 to 10% Fixed 3% F.S.

XL

For models with a solenoid valve, the temperature of the solenoid valve section should be no greater than 50C. All models 1. When controlling valve responsiveness, take note of the size and length of piping, as well as the Cv factor (flow rate characteristics) of the actuating solenoid valve.