Body/Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 15 (ø1.5), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: K (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / NPN 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

JIS Symbol 15-9-19 2 Series AS How to Order 2 2 1 U02 06 K AS 1F Nil Option Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard None Hexagonal lock nut Electroless nickel plated K N If more than one option is required, write option part numbers in the order of K, N. Applicable tubing O.D.

Slider Type/Ball Bushing Bearing

32 Angle coefficient (k) : k = [to 45 (= )] = 1, [to 60] = 0.9, [to 75] = 0.8, [to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 40 6 10 15 20 Bore size (mm) 2.72 1.6 + Lo 5.55 1.95 + Lo 15.96 2.4 + Lo 41.7 2.8 + Lo Allowable drive resisting force (FA) (kg) 5.

Process Valve

(Piping: JIS K 6349 high pressure hose) External Pilot Caution Pilot port piping Combination between the VNA series and Speed controller (AS series) 12(P1) and 10(P2) piping should be as follows according to the model. VNA AS Piping (I.D.)

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

P PD1 PD3 PD2 V For symbols G and H (inch-type female thread), the dimension K becomes the width across flats. 258 ZHP Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. 1.

Compact and Lightweight

L-bracket (Brackets on both sides) L L x n pcs. + J x 2 L x n pcs. + K x 2 Long clamping screw set which is required for assembly needs to be ordered separately. Refer to page 224.

ZSE30A(F)/ISE30A

Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.

RB/RBL/RBQ

Cap MI W S Cap bracket CEP1 CE1 CE2 ML2B C J G5-S (mm) CV Model Basic type With cap With cap Basic type dimensions h Hexagon nut D M14 x 1.5 M14 x 1.5 M20 x 1.5 M27 x 1.5 E1 5 5 6 8 E2 K 11 12 15 25 L LL S E3 LL Z B C H 3.5 3.5 4 5 MM F MVGQ RBC1411 RBC1412 RBC2015 RBC2725 RB1411 RB1412 RB2015 RB2725 12.2 12.2 18.2 25.2 12 12 18 25 12 12 18 25 58.8 58.8 62.2 86 78.3 79.3 88.2 124 67.3 67.3

RZQ

-X 20Data 10-10-9 10 Series RZQ Dimensions Basic style (Double end tapped): RZQA 3-P (port size) FA H effective thread depth C Q FB G I D M K E Z a' a M K L B + Full stroke A + Full stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J E 4-O1 effective thread depth

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MLU

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KA (manual unlocking unit) Dust cover NH1 M(D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF

10-cl1-e

Cushion seal L Guide gasket M Piston gasket Replacement Parts: Lock-up Unit K, L and M are non-replaceable parts, so they are not included in the seal kit. CL 40 TN Port thread type Bore size (mm) Nil Rc NPT G TN TF Consult with SMC when replacing the lock-up unit with a bore size of 125 to 160. 154

Clean Air Module

or more P5: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set and to operate.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

K Setting of security code (F81) Users can select whether a security code must be entered to release key lock. At a time of shipment from the factory, it is set such that the security code is not required. 14 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Pulse Valve

(C) Port size: Size 14 A ( 52) (20) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) H Exhaust port 3/8 2 x P Port size (F) L M (G) (E) (B) J K 20 (C) Dimension in ( ) shows the dimension after tightening.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

Peltier-type Chiller Thermo-con/ Compact Type

Cooled substance total volume V : 2 L Cooling time h : 15 min Cooling temperature difference T : Temperature difference: 10C (10 K). Cool from 30C (303 K) to 20C (293 K). Circulating fluid : Tap water Density : 1 x 103 kg/m3 Specific heat C : 4.2 x 103 J/(kgK) Refer to the information shown below for the typical physical property values by circulating fluid.

With Factory Installed

S. l AR2001 2501 3001 : Max.3.5t :-t-tt ., AR4001 : Max.5.0t ~ I II; a -tp ort cenler (fJ ~ ~c=Pr r-IN j~ OUT f= 0 .bj=J ~ A * N P Q Bracket mounting dimensions Model Port size A B C 0 E F G H J K L M AR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 25 8 33 AR2501 1/4 3/8 53 102.5 25 48 32 30 34 44 5.4 15.4 55 2.3 33.5 25 843 42.5 32.5