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28 Counter CEU5 Wiring with External Equipment 1.

E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11 100 20 25 98 28

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28

Connection thread 1/8 1/4 3/8 1/2 3/4 1 5.2 to 6.6 8.9 to 10.3 16.2 to 17.7 20.7 to 22.1 20.7 to 22.1 26.6 to 28.0 Installation and Adjustment Torque (7 to 9) (12 to 14) (22 to 24) (28 to 30) (28 to 30) (36 to 38) Warning Air Supply 1. Confirm the symbols 1 and 2 before the Warning valve is connected. The port marked 1 is the air inlet and the port marked 2 is the outlet.

.: 8, 5/16" (With check valve) (External pilot port) Channel 2 Channel 1 64.5 Safety limit switch (made by OMRON) Part number: D4N-9B31 A M12 x 1 Pg9 34 Applicable cable O.D. 4.5 to 7 175.9 (190.9: For external pilot) (48.2) (75) Vent port 214.1 Should be normally open. 3 x 8.5 Precautions Optional Accessories (Mounting hole) (27.7) (Max. 3) 3 3 (106.6) 21 57.6 28 41.5 (69.5) 2 1 Specific

Indicator light Lead wire 3 2 R 1/8 Port size 65 g Mass Electrical Specifications ZSM1-115 Supply voltage 4.5 to 28 VDC Output (Open collector) 28 V, Max. 40 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC/DC Max. operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Vacuum switch diaphragm

28 Counter CEU5 Wiring with External Equipment 1.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable temperature range (C) 10 to 80 Effective atmosphere Non-water soluble cutting oil 4.22 4.22 8.73 11.57 22.16 8.73 Extended Spring force (N) 6.18 6.86 14.61 17.65 38.05 14.12 Retracted 26 26 70 150 365 70 Basic type With cap Weight (g) 28 28

DCXT12/16 CXT20/25 CXT32 CXT40 -X 26 mm (One side 13 mm) 28 mm (One side 14 mm) 44 mm (One side 22 mm) 40 mm Stroke adjustment range 20(One side 20 mm) Data For detailed specifications about shock absorber, /refer to page 10-22-1 of Best Pneumatic Vol.10. Shock Absorber Specifications Made to Order Specifications (For details, refer to page 8-31-1.)

Applicable series MGQM Slide bearing MGQL Ball bushing bearing 12, 16, 20, 25, 32 40, 50, 63, 80, 100 Bore size (mm) Bearing type How to Order D By-pass port dia. 20 M Stroke Bore size MGQ Bearing type Slide bearing Ball bushing bearing M L D (mm) MGQL 8 10 12 15 18 18 22 22 28 33 Bore size (mm) A (mm) B (mm) C (mm) Hexagon socket head cap screw Copper-free MGQM 10 12 14 18 22 22 27 27 31

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

A A1 E1 L1 MM RR1 U1 NZ L CNS 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 +0.5 +0.3 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 36 41.6 +0.058 0 -0.3 -0.5 +0.058 0 +0.5 +0.3 44 50.6 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 CLS CLQ MLGP Knuckle Pin (Common with double clevis pin) Rod End Nut RLQ MLU d d Dd9 ML1C C m

Valves output operation at pause Force to OFF() OFF 0x00 Hold last status ON . 4-9 EX245-DX1PROFIenergy / EX245-DX1 LED Proceed ON / / Shut down, Clear value () 0x00 Sensor supply and input value at pause OFF OFF Shut down, Hold last status . 4-10 EX245-DY1PROFIenergy EX245-DY1 LED Proceed ON Force to OFF () OFF 0x00 Digital output operation at pause OFF Hold last status ON 28

EX245-DY1) 28 No.EX-OMU0020CN 4.3.5.3. FSU (Fast Start Up) EX245-SPN1 (FSUFast Start UpFSU)FSU FSU 4.3.5.3.1. EX245-SPN1 PROFINET Properties PropertiesOptionsConnectionTP / ITP 100Mbps full duplex,Disable autonegotiation . 4-11 PROFINET FSU 29 No.EX-OMU0020CN 4.3.5.3.2.

OUT() DC(-) DC(+) PSE57-02-28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -11No.PS-OMT0005CN-A (A/D ) () 20 2030 -12No.PS-OMT0005CN-A PSE575 PSE576 PSE577 02 MPa 05 MPa 010 MPa 5MPa 12.5MPa 30MPa 5%F.S.(25 ) PSE57-02 PSE57-02-28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 ) 2.5F.S. 0.5F.S. 0.5F.S.(25 ) IP65 AC500V 1 100M(DC500 V) -1060 -2070 ()

Nominal thread size Required torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Model Width across flats of attachment PF2W504 34 mm PF2W520 PF2W540 PF2W511 45 mm PF2W504T 34 mm PF2W520T PF2W540T -16No.PF-OMO0014-D Wiring Connections should only be made with the power supply turned off.

Note 28) All the selected nozzles (high voltage power supply module) stop the ion generation. Note 29) Nozzle with a problem (high voltage power supply module) stops the ion generation. Note 15) It takes 3 seconds to operate after the power is on. Note 16) Abnormality can be released by the ion generation stop signal. Release the error after recovery.

28 35 35 41 60 60 MXQ20(A,C) 30.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 34.9 35.9 35.9 35.9 41.9 50.9 75.9 75.9 75.9 MXQ25(A,C) 32.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 42.7 41.7 41.7 41.7 54.7 54.7 40.7 79.7 77.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 16 5.4 5.4 5.4 5.4 5.4 15 25.6 25.6 31.6 48.6 25.6 MXQ8B 27 11.9 11.9 11.9 11.9 11.9 11.9 16 23.1 23.1