1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 Fig. 8 D-F8 0.10 to 0.20 Set screw Auto switch 29 - Auto switch proper mounting position at rotation end Table 11 Auto Switch Rotation range / Actuation / most sensitive position A A A A B B B B D-M9 D-F8 Magnet Operation range at optimum set position (

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Supplementary operation instruction mode 16 7.1 Operation when MODE is ON (Jog operation, teaching) 16 (1) Jog operation 16 (2) Teaching 17 8. Wiring of cables / Common precautions 18 9.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

4 Way 4 and 5 Port Rubber Seal Solenoid Pilot Valve Series SYJ3000 Interchangeable with the NVJ Series Low Power Consumption: 0.5W Base Mounted/Body Ported Configurations Manifolds with Built-in One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Features & Benefits .4-5 Q Q Preferred Option Program .6 Q Specifications Q Valve .8 Manifold .9 Q Q How

Non-contact Gripper

C 2 x M depth ML 11.6 P depth PL Air supply port 4 x M depth ML 4 x M depth ML 16.5 16.5 16.5 D D D XT661-10A-(R, L) XT661-8A-(R, L) P depth PL Air supply port P depth PL Air supply port 45 45 45 45 P.C.D. C P.C.D. C 4 x M depth ML 4 x M depth ML 16.5 16.5 D D ZP3 (mm) ZP3E Part no.

76

F (C) Correction factor 1.41 41 to 86 (5 to 30) Air ow capacity scfm (m3/min) (ANR) 50 Hz 565 (16) 709.8 (20.1) 882.8 (25) 50 (10) 1 1.21 95 (35) 60 Hz 663.8 (18.8) 836.9 (23.7) 953.4 (27) 59 (15) 1.4 1 104 (40) 61 (16) or more 1.5 0.92 113 (45) The maximum coefficient value is 1.5 due to the drainage separation performance. 0.75 122 (50) 0.63 131 (55) Data D: Inlet Air Pressure 0.53 140

Speed Controller with One-touch Fittings

L5 L6 L7 L8 M1 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 12 9.3 12 13.2 15.2 13.2 15.2 18.5 18.5 21.7 36 37 39.5 40.7 42.6 53.4 57.2 59 65 69.8 76.9 81.3 4.5 5.2 6.1 5.2 6.5 6.9 8 7.4 8.2 9.8 10.3 11.3 11.2 11.9 12.8 12.3 13.6 16.5 17.6 19.3 20.1 21.7 22.7 23.7 23.8 24.5 25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 21 21.7 22.7 25.4 26.7 28.4 29.5 33.6 34.4

JXCx-OMT0032CN

e) D(100) 46 - 15.4 1. 2. () 3. () 4. 5. 6. 7. 8. () (-10603585%) 47 - 15.5 5 15.6 OFF 48 - 16. 16.1/ UL1310Class2 16.2 ON 49 - 5 () 50 - 16.3 50mm 16.4 () 51 - 16.5 16.6 D(100) 16.7 52 - Revision history No.JXC-OMT0032CN 20183 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

VS3115-D VS3110-G VS3110-D SCA006SCA001SCAD001SCAD001SCA006SCA001SCAD001SCAD001AC DC Solenoid capsule assembly r t AXT338-6 Spring Piano wire AC DC AZ832-16 Part No. for Mounting Bolt and Gasket y NBR AXT333-14 AXT338-15 Gasket u Resin AXT333-16 Plug for cap AC AXT333-7-11 i DC AXT333-32-8 Stopper BG-VS3010 Resin : Enter the operating voltage.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

35 38.9 15.8 10.9 42.6 48.7 15 36.7 NPT 1/8 NPT 1/4 1/2" 18.5 41.7 11/16" 18 68 20.3 23.1 25.9 26.5 107 116 220 230 14.4 50.3 56.2 19.8 41.9 NPT 1/8 NPT 3/8 1/2" 23 46.9 19 18.3 61.8 70.3 26.5 57.3 NPT 1/4 NPT 1/2 28.6 64.8 15/16" 11/16" Reference dimensions of NPT thread after installation. 15-10-3 4 Series ASP Construction w @0 !

PF-OMM0004_C

-2No.PF-OMM0004-D / 1 1.5 3 3) 1 1 () [] -3No.PF-OMM0004-D () () () () -4No.PF-OMM0004-D () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 () 0~90 3mPas3cP () <> -5No.PF-OMM0004-D * 16 FG (49N () M8 IN IN OUT OUT OUT OUT IN 40 -6No.PF-OMM0004-D * () 6 33 () () 10 m DC(-)() -7No.PF-OMM0004-D * () () CE -8No.PF-OMM0004-D * 3 2459 LCD * -9No.PF-OMM0004-D * , *

RZQ

37.5 27.5 38 24.5 35 26 36.5 30 40.5 29 39.5 40 CC 27 39 31 43 31.5 43.5 28.5 40.5 30 42 34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U

PSxx-OMU0002CN

[LoC][UnL] [LoC] 5[oPE] [LoC][UnL] [UnL] /(64) [UnL] [FAL][LoC] -63No.PS-OMU0002CN-D / ( ) 1 (/30 ) -64No.PS-OMU0002CN-D (1015 ) -65No.PS-OMU0002CN-D ZSE20A(F)/ISE20A () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 () No.6 No.7 -66No.PS-OMU0002CN-D No.8 No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 [Er13] No.18 No.19 -67No.PS-OMU0002CN-D No.